Very low temperature growth of polycrystalline silicon using

1997 ◽  
Vol 101 (1) ◽  
pp. 17-20 ◽  
Author(s):  
Bong Yeol Ryu ◽  
Jai Il Ryu ◽  
Hyun Chul Kim ◽  
Jin Jang
Keyword(s):  
Low Temperature ◽  
Polycrystalline Silicon ◽  
Temperature Growth ◽  
Low Temperature Growth ◽  
Very Low Temperature

Effect of hydrogen on the low-temperature growth of polycrystalline silicon film deposited by SiCl4/H2

2006 ◽  
Vol 513 (1-2) ◽  
pp. 380-384 ◽  
Author(s):  
Rui Huang ◽  
Xuanying Lin ◽  
Wenyong Huang ◽  
Ruohe Yao ◽  
Yunpeng Yu ◽  
...  
Keyword(s):  
Low Temperature ◽  
Polycrystalline Silicon ◽  
Silicon Film ◽  
Temperature Growth ◽  
Low Temperature Growth ◽  
Polycrystalline Silicon Film

scholarly journals Low Temperature Growth of Polycrystalline Silicon Films by RF Sputtering Method(1st Report).

1995 ◽  
Vol 61 (6) ◽  
pp. 829-833
Author(s):  
Hiroaki KAKIUCHI ◽  
Hideaki KAWABE ◽  
Kumayasu YOSHII ◽  
Kiyoshi YASUTAKE ◽  
Akihiro TAKEUCHI ◽  
...  
Keyword(s):  
Low Temperature ◽  
Polycrystalline Silicon ◽  
Rf Sputtering ◽  
Silicon Films ◽  
Temperature Growth ◽  
Low Temperature Growth ◽  
Polycrystalline Silicon Films

Very low temperature growth and doping of Hg-based epilayers and superlattices

1991 ◽  
Vol 111 (1-4) ◽  
pp. 720-724 ◽  
Author(s):  
Y. Lansari ◽  
Z. Yang ◽  
S. Hwang ◽  
F.E. Reed ◽  
A.T. Sowers ◽  
...  
Keyword(s):  
Low Temperature ◽  
Temperature Growth ◽  
Low Temperature Growth ◽  
Very Low Temperature
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