Phase evolution in aluminum nitride thin films on Si(100) prepared by radio frequency magnetron sputtering

2001 ◽  
Vol 384 (2) ◽  
pp. 166-172 ◽  
Author(s):  
Jae Hyoung Choi ◽  
Jeong Yong Lee ◽  
Jin Hyeok Kim
Keyword(s):  
Thin Films ◽  
Aluminum Nitride ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Phase Evolution ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering

Nitrogen Doping into Cu2O Thin Films Deposited by Reactive Radio-Frequency Magnetron Sputtering

2001 ◽  
Vol 40 (Part 1, No. 4B) ◽  
pp. 2765-2768 ◽  
Author(s):  
Shogo Ishizuka ◽  
Shinya Kato ◽  
Takahiro Maruyama ◽  
Katsuhiro Akimoto
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Nitrogen Doping ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Cu2o Thin Films

scholarly journals Radio frequency magnetron sputtering of Li7La3Zr2O12 thin films for solid-state batteries

2016 ◽  
Vol 307 ◽  
pp. 684-689 ◽  
Author(s):  
S. Lobe ◽  
C. Dellen ◽  
M. Finsterbusch ◽  
H.-G. Gehrke ◽  
D. Sebold ◽  
...  
Keyword(s):  
Thin Films ◽  
Solid State ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Solid State Batteries
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