Nucleation and growth during tungsten atomic layer deposition on SiO2 surfaces
2014 ◽
Vol 118
(31)
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pp. 17655-17661
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Keyword(s):
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2017 ◽
Vol 147
(15)
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pp. 154702
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2015 ◽
Vol 119
(6)
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pp. 3379-3387
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2016 ◽
Vol 34
(1)
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pp. 01A150
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2015 ◽
Vol 33
(1)
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pp. 01A128
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2017 ◽
Vol 29
(5)
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pp. 2232-2238
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2018 ◽
Vol 742
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pp. 676-682
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