Low temperature synthesis of dense SiO2 thin films by ion beam induced chemical vapor deposition

2001 ◽  
Vol 396 (1-2) ◽  
pp. 9-15 ◽  
Author(s):  
A Barranco ◽  
F Yubero ◽  
J Cotrino ◽  
J.P Espinós ◽  
J Benı́tez ◽  
...  
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