Low Temperature Synthesis of Nanoscaled Carbon Thin Films by Chemical Vapor Deposition Using Solid Carbon Source

2012 ◽  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Low Temperature ◽  
Carbon Source ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Solid Carbon ◽  
Low Temperature Synthesis ◽  
Temperature Synthesis ◽  
Solid Carbon Source

Low temperature synthesis of dense SiO2 thin films by ion beam induced chemical vapor deposition

2001 ◽  
Vol 396 (1-2) ◽  
pp. 9-15 ◽  
Author(s):  
A Barranco ◽  
F Yubero ◽  
J Cotrino ◽  
J.P Espinós ◽  
J Benı́tez ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Low Temperature ◽  
Vapor Deposition ◽  
Ion Beam ◽  
Chemical Vapor ◽  
Low Temperature Synthesis ◽  
Temperature Synthesis
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