Influence of low energy ion implantation on mechanical properties of magnetron sputtered metastable (Cr,Al)N thin films

2003 ◽  
Vol 437 (1-2) ◽  
pp. 164-169 ◽  
Author(s):  
S Ulrich ◽  
H Holleck ◽  
J Ye ◽  
H Leiste ◽  
R Loos ◽  
...  
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Ion Implantation ◽  
Low Energy

Planar single-crystal thin-films of YAG obtained by ion implantation and thermal exfoliation: Mechanical properties

2012 ◽  
Vol 35 (1) ◽  
pp. 25-28 ◽  
Author(s):  
O. Gaathon ◽  
J.D. Adam ◽  
S.V. Krishnaswamy ◽  
J.W. Kysar ◽  
S. Bakhru ◽  
...  
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Ion Implantation ◽  
Single Crystal

Tuning of fermi level in antimony telluride thin films by low-energy Fe−-ion implantation

2021 ◽  
Vol 127 (12) ◽  
Author(s):  
Jyoti Yadav ◽  
Rini Singh ◽  
M. D. Anoop ◽  
Nisha Yadav ◽  
N. Srinivasa Rao ◽  
...  
Keyword(s):  
Thin Films ◽  
Ion Implantation ◽  
Fermi Level ◽  
Low Energy ◽  
Antimony Telluride

Charged particle spectra of palladium thin films during low energy deuterium ion implantation

1990 ◽  
Vol 9 (3) ◽  
pp. 281-285 ◽  
Author(s):  
G. P. Chambers ◽  
J. E. Eridon ◽  
K. S. Grabowski ◽  
B. D. Sartwell ◽  
D. B. Chrisey
Keyword(s):  
Thin Films ◽  
Charged Particle ◽  
Ion Implantation ◽  
Low Energy ◽  
Particle Spectra

Amorphous iron formation due to low energy heavy ion implantation in evaporated 57Fe thin films

2008 ◽  
Vol 277 (3) ◽  
pp. 699-702 ◽  
Author(s):  
E. Kuzmann ◽  
S. Stichleutner ◽  
Z. Homonnay ◽  
A. Vértes ◽  
A. Paszternák ◽  
...  
Keyword(s):  
Thin Films ◽  
Ion Implantation ◽  
Heavy Ion ◽  
Low Energy ◽  
Iron Formation ◽  
Amorphous Iron
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