LaMnO3 perovskite thin film deposition, from aqueous nitrate solutions of La and Mn, in a low-pressure plasma expanded through a nozzle (PETN)

1997 ◽  
Vol 303 (1-2) ◽  
pp. 17-26 ◽  
Author(s):  
S.F. Miralaï ◽  
R. Avni ◽  
E. Francke ◽  
D. Morvan ◽  
J. Amouroux ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Film Deposition ◽  
Low Pressure ◽  
Film Deposition ◽  
Pressure Plasma ◽  
Low Pressure Plasma ◽  
Nitrate Solutions

Dust particle formation in low pressure Ar/CH4 and Ar/C2H2 discharges used for thin film deposition

Vacuum ◽  
2003 ◽  
Vol 71 (3) ◽  
pp. 377-390 ◽  
Author(s):  
J Berndt ◽  
S Hong ◽  
E Kovačević ◽  
I Stefanović ◽  
J Winter
Keyword(s):  
Thin Film ◽  
Dust Particle ◽  
Thin Film Deposition ◽  
Low Pressure ◽  
Particle Formation ◽  
Film Deposition

Thin film growth from a low pressure plasma excited in a supersonic expanding gas jet

2009 ◽  
Vol 42 (9) ◽  
pp. 095205 ◽  
Author(s):  
C Wachtendorf ◽  
C Herweg ◽  
M Daeuber ◽  
J Benedikt ◽  
A von Keudell
Keyword(s):  
Thin Film ◽  
Film Growth ◽  
Low Pressure ◽  
Thin Film Growth ◽  
Gas Jet ◽  
Pressure Plasma ◽  
Low Pressure Plasma
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