Corrosion performance of CrN/NbN superlattice coatings deposited by the combined cathodic arc/unbalanced magnetron technique

Vacuum ◽

10.1016/s0042-207x(98)00405-9 ◽

1999 ◽

Vol 53 (1-2) ◽

pp. 117-121 ◽

Author(s):

M. Tomlinson ◽

S.B. Lyon ◽

P. Hovsepian ◽

W-D. Munz

Keyword(s):

Corrosion Performance ◽

Unbalanced Magnetron ◽

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Localised oxidation defects in TiAlN/CrN superlattice structured hard coatings grown by cathodic arc/ unbalanced magnetron deposition on various substrate materials

Surface and Coatings Technology ◽

10.1016/s0257-8972(99)00571-x ◽

2000 ◽

Vol 125 (1-3) ◽

pp. 263-268 ◽

Author(s):

M.I. Lembke ◽

D.B. Lewis ◽

W.-D. Münz

Keyword(s):

Hard Coatings ◽

Magnetron Deposition ◽

Unbalanced Magnetron ◽

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Large-Scale Manufacturing of Nanoscale Multilayered Hard Coatings Deposited by Cathodic Arc/Unbalanced Magnetron Sputtering

MRS Bulletin ◽

10.1557/mrs2003.58 ◽

2003 ◽

Vol 28 (3) ◽

pp. 173-179 ◽

Author(s):

W.-D. Münz

Keyword(s):

Magnetron Sputtering ◽

Physical Vapor Deposition ◽

Large Scale ◽

Hard Coatings ◽

Unbalanced Magnetron Sputtering ◽

Unbalanced Magnetron ◽

Gas Atmosphere ◽

Plastic Hardness ◽

Corrosion Resistant Coatings ◽

AbstractNanoscale multilayered (superlattice) hard coatings can be manufactured in a plastic hardness range (HP) between 25GPa and 55 GPa by a combination of cathodic arc evaporation and unbalanced magnetron sputtering (arc bond sputter technology). Using large-scale industrial physical vapor deposition (PVD) equipment and a sufficiently high pumping speed, multilayered coatings can be deposited by simultaneously operating cathodes without special shutter and shielding facilities in a common reactive-gas atmosphere. The efficiency of the process is in many cases identical to that of TiN and CrN. Temperature-resistant, wear-resistant, and corrosion-resistant coatings of various compositions have been produced under industrial conditions. So far, the main applications concentrate on metal-forming and on cutting die steel, Inconel, stainless steel, and titanium. Applications have also been found in the chemical, textile, medical, and automotive industries.

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Raman spectroscopy study of C/Cr coatings deposited by the combined steered cathodic ARC/unbalanced magnetron sputtering technique

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2005.02.023 ◽

2005 ◽

Vol 200 (1-4) ◽

pp. 1117-1122 ◽

Author(s):

Y.N. Kok ◽

P.Eh. Hovsepian ◽

R. Haasch ◽

I. Petrov

Keyword(s):

Raman Spectroscopy ◽

Magnetron Sputtering ◽

Spectroscopy Study ◽

Unbalanced Magnetron Sputtering ◽

Unbalanced Magnetron ◽

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Comparison of microstructure and mechanical properties of chromium nitride-based coatings deposited by high power impulse magnetron sputtering and by the combined steered cathodic arc/unbalanced magnetron technique

Thin Solid Films ◽

10.1016/j.tsf.2003.11.113 ◽

2004 ◽

Vol 457 (2) ◽

pp. 270-277 ◽

Author(s):

A.P Ehiasarian ◽

P.Eh Hovsepian ◽

L Hultman ◽

U Helmersson

Keyword(s):

Mechanical Properties ◽

Magnetron Sputtering ◽

Chromium Nitride ◽

Microstructure And Mechanical Properties ◽

Unbalanced Magnetron ◽

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Enhanced adhesion through local epitaxy of transition-metal nitride coatings on ferritic steel promoted by metal ion etching in a combined cathodic arc/unbalanced magnetron deposition system

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.582414 ◽

2000 ◽

Vol 18 (4) ◽

pp. 1718-1723 ◽

Author(s):

C. Schönjahn ◽

L. A. Donohue ◽

D. B. Lewis ◽

W.-D. Münz ◽

R. D. Twesten ◽

...

Keyword(s):

Transition Metal ◽

Metal Ion ◽

Ferritic Steel ◽

Ion Etching ◽

Metal Nitride ◽

Magnetron Deposition ◽

Transition Metal Nitride ◽

Unbalanced Magnetron ◽

Nitride Coatings ◽

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Combined steered cathodic arc/unbalanced magnetron grown C/Cr nanoscale multilayer coatings for tribological applications

Surface and Coatings Technology ◽

10.1016/s0257-8972(03)00608-x ◽

2003 ◽

Vol 174-175 ◽

pp. 762-769 ◽

Author(s):

P.Eh. Hovsepian ◽

D.B. Lewis ◽

C. Constable ◽

Q. Luo ◽

Y.N. Kok ◽

...

Keyword(s):

Multilayer Coatings ◽

Unbalanced Magnetron ◽

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Characterisation of co-sputtered Nb:Cr coatings grown by the combined cathodic arc/unbalanced magnetron sputtering technique

Surface and Coatings Technology ◽

10.1016/s0257-8972(99)00192-9 ◽

1999 ◽

Vol 116-119 ◽

pp. 1145-1151 ◽

Author(s):

H. Paritong ◽

M. Lembke ◽

D.B. Lewis ◽

W.-D. Münz

Keyword(s):

Magnetron Sputtering ◽

Unbalanced Magnetron Sputtering ◽

Unbalanced Magnetron ◽

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Novel coating systems produced by the combined cathodic arc/unbalanced magnetron sputtering for environmental protection of titanium alloys

Surface and Coatings Technology ◽

10.1016/s0257-8972(02)00063-4 ◽

2002 ◽

Vol 155 (2-3) ◽

pp. 103-111 ◽

Author(s):

C Leyens ◽

M Peters ◽

P.Eh Hovsepian ◽

D.B Lewis ◽

Q Luo ◽

...

Keyword(s):

Magnetron Sputtering ◽

Titanium Alloys ◽

Environmental Protection ◽

Unbalanced Magnetron Sputtering ◽

Unbalanced Magnetron ◽

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Combined cathodic arc/unbalanced magnetron grown CrN/NbN superlattice coatings for applications in the cutlery industry

Surface and Coatings Technology ◽

10.1016/s0257-8972(00)00921-x ◽

2000 ◽

Vol 133-134 ◽

pp. 508-516 ◽

Author(s):

P.Eh Hovsepian ◽

W.-D Münz ◽

A Medlock ◽

G Gregory

Keyword(s):

Unbalanced Magnetron ◽

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Properties of various large-scale fabricated TiAlN- and CrN-based superlattice coatings grown by combined cathodic arc–unbalanced magnetron sputter deposition

Surface and Coatings Technology ◽

10.1016/s0257-8972(99)00572-1 ◽

2000 ◽

Vol 125 (1-3) ◽

pp. 269-277 ◽

Author(s):

W.-D Münz ◽

L.A Donohue ◽

P.Eh Hovsepian

Keyword(s):

Large Scale ◽

Sputter Deposition ◽

Unbalanced Magnetron ◽

Magnetron Sputter Deposition ◽

Magnetron Sputter ◽

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