Combined steered cathodic arc/unbalanced magnetron grown C/Cr nanoscale multilayer coatings for tribological applications

Three types of nano-multilayer coatings, CrSiN, CrAlN and CrMoN, with different Si, Al and Mo contents were deposited on M42 substrates using a closed field unbalanced magnetron sputter ion plating (CFUMSIP) technique. Systematic characterization on the chemical composition, microstructure, hardness and wear properties of these multilayer coatings has been investigated using GDOES, low angle XRD, SEM, TEM, nanoindentation and wear tests. Experimental results revealed that all these three types of Cr, XN ternary coatings (X=Al, Si and Mo) are nano-multilayer structured. The CrAlN multilayer coatings showed the highest hardness and oxidation resistance among these three multilayer coatings. The CrMoN multilayer coatings exhibited the lowest friction coefficient although no appreciable improvements in wear resistance were observed as compared with the optimized CrN coatings.

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Comparative Evaluation of TiN/CrN, AlN/CrN, TiAlN/CrN Multilayer Films for the Use of Semi-Solid Processing of Cu Alloys

Solid State Phenomena ◽

10.4028/www.scientific.net/ssp.116-117.124 ◽

2006 ◽

Vol 116-117 ◽

pp. 124-127 ◽

Cited By ~ 7

Author(s):

Sang Yong Lee ◽

Sang Yul Lee

Keyword(s):

High Temperature ◽

Oxidation Resistance ◽

Multilayer Coatings ◽

Closed Field ◽

Unbalanced Magnetron Sputtering ◽

Cu Alloys ◽

Unbalanced Magnetron ◽

Nanoindentation Hardness ◽

Semi Solid ◽

Superlattice Period

In order to investigate the effect of PVD coatings on the performance of proto-type high temperature mold and to identify the best candidate thin films for Cu semi-solid processing, TiAlN/CrN multilayer coatings with various superlattice periods was synthesized using a closed field unbalanced magnetron sputtering method with separate Cr and TiAl and characteristics of these films were compared with those from TiN/CrN and AlN/CrN films in terms of microstructure, nanoindentation hardness, and oxidation test at 900 in air. TiN/CrN film showed the best mechanical properties but their oxidation resistance, the most critical property for high temperature semi-solid processing was the poorest. Therefore TiAlN films with a superlattice period of 6.1nm which has intermediate plastic deformation resistance with the best oxidation resistance were considered to be the best candidate out of three different films studied in this work.

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Localised oxidation defects in TiAlN/CrN superlattice structured hard coatings grown by cathodic arc/ unbalanced magnetron deposition on various substrate materials

Surface and Coatings Technology ◽

10.1016/s0257-8972(99)00571-x ◽

2000 ◽

Vol 125 (1-3) ◽

pp. 263-268 ◽

Cited By ~ 34

Author(s):

M.I. Lembke ◽

D.B. Lewis ◽

W.-D. Münz

Keyword(s):

Hard Coatings ◽

Magnetron Deposition ◽

Unbalanced Magnetron ◽

Cathodic Arc

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Large-Scale Manufacturing of Nanoscale Multilayered Hard Coatings Deposited by Cathodic Arc/Unbalanced Magnetron Sputtering

MRS Bulletin ◽

10.1557/mrs2003.58 ◽

2003 ◽

Vol 28 (3) ◽

pp. 173-179 ◽

Cited By ~ 56

Author(s):

W.-D. Münz

Keyword(s):

Magnetron Sputtering ◽

Physical Vapor Deposition ◽

Large Scale ◽

Hard Coatings ◽

Unbalanced Magnetron Sputtering ◽

Unbalanced Magnetron ◽

Gas Atmosphere ◽

Plastic Hardness ◽

Corrosion Resistant Coatings ◽

Cathodic Arc

AbstractNanoscale multilayered (superlattice) hard coatings can be manufactured in a plastic hardness range (HP) between 25GPa and 55 GPa by a combination of cathodic arc evaporation and unbalanced magnetron sputtering (arc bond sputter technology). Using large-scale industrial physical vapor deposition (PVD) equipment and a sufficiently high pumping speed, multilayered coatings can be deposited by simultaneously operating cathodes without special shutter and shielding facilities in a common reactive-gas atmosphere. The efficiency of the process is in many cases identical to that of TiN and CrN. Temperature-resistant, wear-resistant, and corrosion-resistant coatings of various compositions have been produced under industrial conditions. So far, the main applications concentrate on metal-forming and on cutting die steel, Inconel, stainless steel, and titanium. Applications have also been found in the chemical, textile, medical, and automotive industries.

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