Electrical properties of Sb-doped PZT films deposited by d.c. reactive sputtering using multi-targets

1998 ◽  
Vol 37 (3) ◽  
pp. 119-127 ◽  
Author(s):  
Won-Youl Choi ◽  
Joon-Hyung Ahn ◽  
Won-Jae Lee ◽  
Ho-Gi Kim
Keyword(s):  
Electrical Properties ◽  
Reactive Sputtering ◽  
Pzt Films

Design, synthesis, microstructure and electrical properties of thermal-strained PZT films

2021 ◽  
Author(s):  
Xiaokuo Er ◽  
Fei Shao ◽  
Sizhe Diao ◽  
Hongliang Wang ◽  
Qinghua Ma ◽  
...  
Keyword(s):  
Electrical Properties ◽  
Design Synthesis ◽  
Pzt Films

Effect of Pb Content on the Fatigue Properties of D.C. Reactive Sputtering-Derived PZT Thin Films

2006 ◽  
Vol 326-328 ◽  
pp. 613-616
Author(s):  
Dae Jin Yang ◽  
Seong Je Cho ◽  
Jong Oh Kim ◽  
Won Youl Choi
Keyword(s):  
Lead Zirconate Titanate ◽  
Perovskite Phase ◽  
Fatigue Behavior ◽  
Ferroelectric Properties ◽  
Pyrochlore Phase ◽  
Reactive Sputtering ◽  
Lead Zirconate ◽  
Fatigue Properties ◽  
Pzt Thin Films ◽  
Pzt Films

Lead zirconate titanate (Pb(Zr0.48Ti0.52)O3 or PZT) films were grown on platinized silicon wafers (Pt/SiO2/Si) by d.c. reactive sputtering method with multi targets. The Pb content of PZT films has been widely recognized as affecting not only the phase formation and microstructure but also the dielectric and ferroelectric properties. Pb content of PZT films was controlled by the variation of Pb target current. The relation between Pb content and Pb target current was expressed as y=0.89x-11.09. The x and y are Pb target current and Pb content, respectively. The pyrochlore phase was transformed to perovskite phase as Pb content was increased. This phase transformation improved the ferroelectric properties of PZT films. In PZT films with perovskite phase, fatigue properties were not improved with excess Pb content. Fatigue properties of PZT films began to be fatigued after 106 switching cycles and coincided with the typical PZT fatigue behavior. Excess Pb content (Pb vacancy) did not affect the fatigue properties of PZT films.

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