Ion beam assisted deposition of tantalum nitride thin films for vacuum microelectronics devices
2002 ◽
Vol 158-159
◽
pp. 729-731
◽
Keyword(s):
Ion Beam
◽
2004 ◽
Vol 131
(7)
◽
pp. 479-484
◽
1996 ◽
Vol 288
(1-2)
◽
pp. 300-308
◽