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Structures and properties of copper thin films prepared by ion beam assisted deposition
Thin Solid Films
◽
10.1016/s0040-6090(96)08828-1
◽
1996
◽
Vol 288
(1-2)
◽
pp. 300-308
◽
Cited By ~ 12
Author(s):
Y. Gotoh
◽
H. Yoshii
◽
T. Amioka
◽
K. Kameyama
◽
H. Tsuji
◽
...
Keyword(s):
Thin Films
◽
Ion Beam
◽
Ion Beam Assisted Deposition
◽
Structures And Properties
Download Full-text
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Plasmonic properties of titanium nitride thin films prepared by ion beam assisted deposition
Materials Letters
◽
10.1016/j.matlet.2016.08.147
◽
2016
◽
Vol 185
◽
pp. 295-298
◽
Cited By ~ 10
Author(s):
Lin-Ao Zhang
◽
Hao-Nan Liu
◽
Xiao-Xia Suo
◽
Shuo Tong
◽
Ying-Lan Li
◽
...
Keyword(s):
Thin Films
◽
Titanium Nitride
◽
Ion Beam
◽
Ion Beam Assisted Deposition
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Optical and electrical properties of p-type zinc oxide thin films synthesized by ion beam assisted deposition
Thin Solid Films
◽
10.1016/j.tsf.2005.06.035
◽
2005
◽
Vol 492
(1-2)
◽
pp. 203-206
◽
Cited By ~ 26
Author(s):
Zhi Yan
◽
Zhi Tang Song
◽
Wei Li Liu
◽
Qing Wan
◽
Fu Min Zhang
◽
...
Keyword(s):
Thin Films
◽
Zinc Oxide
◽
Electrical Properties
◽
Ion Beam
◽
Optical And Electrical Properties
◽
Oxide Thin Films
◽
Ion Beam Assisted Deposition
◽
P Type
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Ion beam assisted deposition of niobium nitride thin films for vacuum microelectronics devices
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
◽
10.1016/s0168-583x(98)00679-x
◽
1999
◽
Vol 148
(1-4)
◽
pp. 925-929
◽
Cited By ~ 49
Author(s):
Y Gotoh
◽
M Nagao
◽
T Ura
◽
H Tsuji
◽
J Ishikawa
Keyword(s):
Thin Films
◽
Ion Beam
◽
Niobium Nitride
◽
Vacuum Microelectronics
◽
Ion Beam Assisted Deposition
Download Full-text
Mechanical properties of silicon oxynitride thin films prepared by low energy ion beam assisted deposition
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
◽
10.1016/s0168-583x(98)00811-8
◽
1999
◽
Vol 148
(1-4)
◽
pp. 599-603
◽
Cited By ~ 14
Author(s):
Yukari Shima
◽
Hiroki Hasuyama
◽
Toshiharu Kondoh
◽
Yasuo Imaoka
◽
Takanori Watari
◽
...
Keyword(s):
Thin Films
◽
Mechanical Properties
◽
Ion Beam
◽
Silicon Oxynitride
◽
Low Energy
◽
Ion Beam Assisted Deposition
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A rate-equation model for the growth of metallic thin films in ion beam assisted deposition
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
◽
10.1016/s0168-583x(01)00821-7
◽
2001
◽
Vol 184
(4)
◽
pp. 523-530
◽
Cited By ~ 7
Author(s):
J. Sillanpää
◽
I.T. Koponen
◽
N. Grønbech-Jensen
Keyword(s):
Thin Films
◽
Rate Equation
◽
Ion Beam
◽
Equation Model
◽
Metallic Thin Films
◽
Rate Equation Model
◽
Ion Beam Assisted Deposition
Download Full-text
Mössbauer spectroscopic study of iron–nickel nitrides thin films prepared by ion beam assisted deposition
Hyperfine Interactions
◽
10.1007/s10751-011-0359-8
◽
2011
◽
Vol 202
(1-3)
◽
pp. 47-55
Author(s):
P. Prieto
◽
M. Monti
◽
J. de la Figuera
◽
J. M. Sanz
◽
J. F. Marco
Keyword(s):
Thin Films
◽
Spectroscopic Study
◽
Ion Beam
◽
Ion Beam Assisted Deposition
◽
Iron Nickel
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Ti, TiN, and Ti/TiN thin films prepared by ion beam assisted deposition as diffusion barriers between Cu and Si
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
◽
10.1116/1.1288942
◽
2000
◽
Vol 18
(5)
◽
pp. 2312
◽
Cited By ~ 7
Author(s):
Haicuan Mu
◽
Yuehui Yu
◽
E. Z. Luo
◽
B. Sundaravel
◽
S. P. Wong
◽
...
Keyword(s):
Thin Films
◽
Ion Beam
◽
Diffusion Barriers
◽
Ion Beam Assisted Deposition
◽
Tin Thin Films
Download Full-text
Electrochemical evaluation of thin films and coatings deposited with ion beam assisted deposition (IBAD) using scanning electrochemical microelectrode
Materialwissenschaft und Werkstofftechnik
◽
10.1002/mawe.19980290209
◽
1998
◽
Vol 29
(2)
◽
pp. 66-71
◽
Cited By ~ 2
Author(s):
E. Vera
◽
F. Stippich
◽
K. Meinert
◽
G. K. Wolf
Keyword(s):
Thin Films
◽
Ion Beam
◽
Ion Beam Assisted Deposition
◽
Electrochemical Evaluation
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Properties and phase transition of (Ti,Al)N thin films prepared by ion beam-assisted deposition
Intermetallics
◽
10.1016/j.intermet.2008.04.017
◽
2008
◽
Vol 16
(8)
◽
pp. 987-994
◽
Cited By ~ 7
Author(s):
P. Budzynski
◽
J. Sielanko
◽
Z. Surowiec
Keyword(s):
Thin Films
◽
Phase Transition
◽
Ion Beam
◽
Ion Beam Assisted Deposition
Download Full-text
Characterization of magnesium fluoride thin films produced by argon ion beam-assisted deposition
Thin Solid Films
◽
10.1016/s0040-6090(00)01414-0
◽
2001
◽
Vol 382
(1-2)
◽
pp. 61-68
◽
Cited By ~ 9
Author(s):
L. Dumas
◽
E. Quesnel
◽
J.-Y. Robic
◽
Y. Pauleau
Keyword(s):
Thin Films
◽
Ion Beam
◽
Magnesium Fluoride
◽
Ion Beam Assisted Deposition
◽
Argon Ion
Download Full-text
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