Pulsed laser deposition of a-CNx:H films: the role of target-to-substrate distance and laser fluence
2000 ◽
Vol 154-155
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pp. 454-457
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Keyword(s):
2007 ◽
Vol 254
(4)
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pp. 1316-1321
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Keyword(s):
2007 ◽
Vol 254
(4)
◽
pp. 1228-1231
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Keyword(s):
Keyword(s):
Keyword(s):
2012 ◽
Vol 423-424
◽
pp. 21-27
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Keyword(s):