Properties of (Ti,Al)N coatings deposited by the magnetic filter cathodic arc

A new Zeiss TEM with an imaging Omega filter is a fully digitized, side-entry, 120 kV TEM/STEM instrument for materials science. The machine possesses an Omega magnetic imaging energy filter (see Fig. 1) placed between the third and fourth projector lens. Lanio designed the filter and a prototype was built at the Fritz-Haber-Institut in Berlin, Germany. The imaging magnetic filter allows energy-filtered images or diffraction patterns to be recorded without scanning using efficient area detection. The energy dispersion at the exit slit (Fig. 1) results in ∼ 1.5 μm/eV which allows imaging with energy windows of ≤ 10 eV. The smallest probe size of the microscope is 1.6 nm and the Koehler illumination system is used for the first time in a TEM. Serial recording of EELS spectra with a resolution < 1 eV is possible. The digital control allows X,Y,Z coordinates and tilt settings to be stored and later recalled.

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Residual stress and elastic anisotropy in the Ti-Al-(Si-)N and Cr-Al-(Si-)N nanocomposites deposited by cathodic arc evaporation

Zeitschrift für Kristallographie Supplements ◽

10.1524/zksu.2008.0031 ◽

2008 ◽

Vol 2008 (27) ◽

pp. 245-252 ◽

Cited By ~ 1

Author(s):

M. Dopita ◽

Ch. Wüstefeld ◽

V. Klemm ◽

G. Schreiber ◽

D. Heger ◽

...

Keyword(s):

Residual Stress ◽

Elastic Anisotropy ◽

Cathodic Arc Evaporation ◽

Arc Evaporation ◽

Cathodic Arc

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Monte Carlo calculation of the energy parameters and spatial distribution of the cathodic arc ions while passing through the macro-particles filters

International Journal of Computational Physics Series ◽

10.29167/a1i1p30-34 ◽

2018 ◽

Vol 1 (1) ◽

pp. 30-34 ◽

Cited By ~ 2

Author(s):

Alexey Chernogor ◽

Igor Blinkov ◽

Alexey Volkhonskiy

Keyword(s):

Magnetic Field ◽

Mass Transfer ◽

Monte Carlo ◽

Monte Carlo Calculation ◽

Inhomogeneous Magnetic Field ◽

Flow Energy ◽

Wide Range ◽

Field Concentrator ◽

Cathodic Arc ◽

The Magnetic Field

The flow, energy distribution and concentrations profiles of Ti ions in cathodic arc are studied by test particle Monte Carlo simulations with considering the mass transfer through the macro-particles filters with inhomogeneous magnetic field. The loss of ions due to their deposition on filter walls was calculated as a function of electric current and number of turns in the coil. The magnetic field concentrator that arises in the bending region of the filters leads to increase the loss of the ions component of cathodic arc. The ions loss up to 80 % of their energy resulted by the paired elastic collisions which correspond to the experimental results. The ion fluxes arriving at the surface of the substrates during planetary rotating of them opposite the evaporators mounted to each other at an angle of 120° characterized by the wide range of mutual overlapping.

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