Aluminium nitride films deposition by reactive triode sputtering for surface acoustic wave device applications

2003 ◽  
Vol 176 (1) ◽  
pp. 88-92 ◽  
Author(s):  
V. Mortet ◽  
A. Vasin ◽  
P.-Y. Jouan ◽  
O. Elmazria ◽  
M.-A. Djouadi
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Aluminium Nitride ◽  
Surface Acoustic Wave Device ◽  
Device Applications ◽  
Acoustic Wave Device ◽  
Wave Device

Structural characterisations of AlN/diamond structures used for surface acoustic wave device applications

2003 ◽  
Vol 199 (1) ◽  
pp. 145-150 ◽  
Author(s):  
V. Mortet ◽  
O. Elmazria ◽  
M. Nesládek ◽  
M. Elhakiki ◽  
G. Vanhoyland ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Surface Acoustic Wave Device ◽  
Device Applications ◽  
Acoustic Wave Device ◽  
Wave Device

A novel optimal sensitivity design scheme for yarn tension sensor using surface acoustic wave device

Ultrasonics ◽  
2014 ◽  
Vol 54 (6) ◽  
pp. 1649-1655 ◽  
Author(s):  
Bingbing Lei ◽  
Wenke Lu ◽  
Changchun Zhu ◽  
Qinghong Liu ◽  
Haoxin Zhang
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Yarn Tension ◽  
Design Scheme ◽  
Surface Acoustic Wave Device ◽  
Tension Sensor ◽  
Acoustic Wave Device ◽  
Wave Device

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2021 ◽  
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Author(s):  
Xinyu Song ◽  
Hao Jin ◽  
Shurong Dong ◽  
Miling Zhang ◽  
Jikai Zhang ◽  
...  
Keyword(s):  
High Temperature ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Composite Electrode ◽  
Surface Acoustic Wave Device ◽  
Acoustic Wave Device ◽  
Wave Device ◽  
Temperature Surface
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