scholarly journals Doping and electrical properties of amorphous silicon carbon nitride films

2003 ◽  
Vol 12 (3-7) ◽  
pp. 1213-1219 ◽  
Author(s):  
Y.C. Chou ◽  
S. Chattopadhyay ◽  
L.C. Chen ◽  
Y.F. Chen ◽  
K.H. Chen
Keyword(s):  
Electrical Properties ◽  
Amorphous Silicon ◽  
Carbon Nitride ◽  
Silicon Carbon ◽  
Silicon Carbon Nitride

Hydrogenated amorphous silicon carbon nitride films prepared by PECVD technology: properties

2012 ◽  
Vol 63 (5) ◽  
pp. 333-335 ◽  
Author(s):  
Jozef Huran ◽  
Albín Valovič ◽  
Michal Kučera ◽  
Angela Kleinová ◽  
Eva Kovačcová ◽  
...  
Keyword(s):  
Amorphous Silicon ◽  
Amorphous Materials ◽  
Carbon Nitride ◽  
Hydrogenated Amorphous Silicon ◽  
Electrical Characterization ◽  
Chemical Vapor ◽  
Silicon Carbon ◽  
Two Peaks ◽  
Hydrogenated Amorphous ◽  
Silicon Carbon Nitride

Hydrogenated amorphous silicon carbon nitride films were grown by plasma enhanced chemical vapor deposition (PECVD) technique. The flow rates of SiH4 , CH4 and NH3 gases were 6 sccm, 30 sccm and 8 sccm, respectively. The deposition temperatures were 350, 400 and 450 ◦C. The RBS and ERD results showed that the concentrations of Si, C, N and H are practically the same in the films deposited at substrate temperatures in the range 350-450 ◦C. In photoluminescence spectra we identified two peaks and assigned them to radiative transitions typical for amorphous materials, ie band to band and defect-related ones. The electrical characterization consists of I(V ) measurement in sandwich configuration for voltages up to 100 V. From electrical characterization, it was found that with increased deposition temperature the resistivity of the amorphous SiCN film was reduced.

Photoconductivity and highly selective ultraviolet sensing features of amorphous silicon carbon nitride thin films

2006 ◽  
Vol 88 (7) ◽  
pp. 073515 ◽  
Author(s):  
Chun-Wei Chen ◽  
Cheng-Chia Huang ◽  
Yun-Yue Lin ◽  
Wei-Fang Su ◽  
Li-Chyong Chen ◽  
...  
Keyword(s):  
Thin Films ◽  
Amorphous Silicon ◽  
Carbon Nitride ◽  
Silicon Carbon ◽  
Silicon Carbon Nitride

Processing and characterization of silicon carbon-nitride ceramics: application of electrical properties towards MEMS thermal actuators

2003 ◽  
Vol 103 (1-2) ◽  
pp. 171-181 ◽  
Author(s):  
Li-Anne Liew ◽  
R.A. Saravanan ◽  
Victor M. Bright ◽  
Martin L. Dunn ◽  
John W. Daily ◽  
...  
Keyword(s):  
Electrical Properties ◽  
Carbon Nitride ◽  
Thermal Actuators ◽  
Silicon Carbon ◽  
Nitride Ceramics ◽  
Silicon Carbon Nitride

Structure and elastic properties of amorphous silicon carbon nitride films

2001 ◽  
Vol 64 (16) ◽  
Author(s):  
G. Lehmann ◽  
P. Hess ◽  
J.-J. Wu ◽  
C. T. Wu ◽  
T. S. Wong ◽  
...  
Keyword(s):  
Amorphous Silicon ◽  
Elastic Properties ◽  
Carbon Nitride ◽  
Silicon Carbon ◽  
Silicon Carbon Nitride

Thermal diffusivity in amorphous silicon carbon nitride thin films by the traveling wave technique

2001 ◽  
Vol 79 (3) ◽  
pp. 332-334 ◽  
Author(s):  
S. Chattopadhyay ◽  
L. C. Chen ◽  
C. T. Wu ◽  
K. H. Chen ◽  
J. S. Wu ◽  
...  
Keyword(s):  
Thin Films ◽  
Thermal Diffusivity ◽  
Amorphous Silicon ◽  
Traveling Wave ◽  
Carbon Nitride ◽  
Silicon Carbon ◽  
Wave Technique ◽  
Silicon Carbon Nitride
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