Processing and characterization of silicon carbon-nitride ceramics: application of electrical properties towards MEMS thermal actuators
2003 ◽
Vol 103
(1-2)
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pp. 171-181
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Keyword(s):
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2020 ◽
Vol 9
(12)
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pp. 123011
2003 ◽
Vol 12
(3-7)
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pp. 1213-1219
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2013 ◽
Vol 25
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pp. 41-47
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2007 ◽
Vol 46
(11-12)
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pp. 543-549
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2015 ◽
Vol 339
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pp. 102-108
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2013 ◽
Vol 143
(1)
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pp. 223-227
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