Analysis of thermo-mechanical coupling damage behavior in long-term performance of microelectromechanical systems actuators

Effective numerical analysis is significant for the optimal design and reliability evaluation of MEMS, but the complexity of multi-physical field couplings and irreversible damage accumulation in long-term performance make the analysis difficult. In the present paper, the continuum damage mechanics method is used to develop a creep damage model and conduct long-term performance analysis for MEMS thermal actuators with coupled thermo-mechanical damage behavior. The developed damage model can make a connection between the material deterioration due to microstructure changes and the macroscopic responses (the change of thermo-mechanical performance or structure failure). The numerical simulations of coupled thermo-mechanical behavior in long-term performance are implemented using the finite element method, which is validated through comparison with previous literature. The numerical results demonstrate that the proposed damage model and numerical method can provide effective assessment in the long-term performance of MEMS thermal actuators.

Controlled Fabrication of Quality ZnO NWs/CNTs and ZnO NWs/Gr Heterostructures via Direct Two-Step CVD Method

A novel and advanced approach of growing zinc oxide nanowires (ZnO NWs) directly on single-walled carbon nanotubes (SWCNTs) and graphene (Gr) surfaces has been demonstrated through the successful formation of 1D–1D and 1D–2D heterostructure interfaces. The direct two-step chemical vapor deposition (CVD) method was utilized to ensure high-quality materials’ synthesis and scalable production of different architectures. Iron-based universal compound molecular ink was used as a catalyst in both processes (a) to form a monolayer of horizontally defined networks of SWCNTs interfaced with vertically oriented ZnO NWs and (b) to grow densely packed ZnO NWs directly on a graphene surface. We show here that our universal compound molecular ink is efficient and selective in the direct synthesis of ZnO NWs/CNTs and ZnO NWs/Gr heterostructures. Heterostructures were also selectively patterned through different fabrication techniques and grown in predefined locations, demonstrating an ability to control materials’ placement and morphology. Several characterization tools were employed to interrogate the prepared heterostructures. ZnO NWs were shown to grow uniformly over the network of SWCNTs, and much denser packed vertically oriented ZnO NWs were produced on graphene thin films. Such heterostructures can be used widely in many potential applications, such as photocatalysts, supercapacitors, solar cells, piezoelectric or thermal actuators, as well as chemical or biological sensors.

Multi-functional 2D hybrid aerogels for gas absorption applications

Aerogels have attracted significant attention recently due to their ultra-light weight porous structure, mechanical robustness, high electrical conductivity, facile scalability and their use as gas and oil absorbers. Herein, we examine the multi-functional properties of hybrid aerogels consisting of reduced graphene oxide (rGO) integrated with hexagonal boron nitride (hBN) platelets. Using a freeze-drying approach, hybrid aerogels are fabricated by simple mixing with various volume fractions of hBN and rGO up to 0.5/0.5 ratio. The fabrication method is simple, cost effective, scalable and can be extended to other 2D materials combinations. The hybrid rGO/hBN aerogels (HAs) are mechanically robust and highly compressible with mechanical properties similar to those of the pure rGO aerogel. We show that the presence of hBN in the HAs enhances the gas absorption capacities of formaldehyde and water vapour up to ~ 7 and > 8 times, respectively, as compared to pure rGO aerogel. Moreover, the samples show good recoverability, making them highly efficient materials for gas absorption applications and for the protection of artefacts such as paintings in storage facilities. Finally, even in the presence of large quantity of insulating hBN, the HAs are electrically conductive, extending the potential application spectrum of the proposed hybrids to the field of electro-thermal actuators. The work proposed here paves the way for the design and production of novel 2D materials combinations with tailored multi-functionalities suited for a large variety of modern applications.

Demonstration of tantalum as a structural material for MEMS thermal actuators

This work demonstrates the processing, modeling, and characterization of nanocrystalline refractory metal tantalum (Ta) as a new structural material for microelectromechanical system (MEMS) thermal actuators (TAs). Nanocrystalline Ta films have a coefficient of thermal expansion (CTE) and Young’s modulus comparable to bulk Ta but an approximately ten times greater yield strength. The mechanical properties and grain size remain stable after annealing at temperatures as high as 1000 °C. Ta has a high melting temperature (Tm = 3017 °C) and a low resistivity (ρ = 20 µΩ cm). Compared to TAs made from the dominant MEMS material, polycrystalline silicon (polysilicon, Tm = 1414 °C, ρ = 2000 µΩ cm), Ta TAs theoretically require less than half the power input for the same force and displacement, and their temperature change is half that of polysilicon. Ta TAs operate at a voltage 16 times lower than that of other TAs, making them compatible with complementary metal oxide semiconductors (CMOS). We select α-phase Ta and etch 2.5-μm-thick sputter-deposited films with a 1 μm width while maintaining a vertical sidewall profile to ensure in-plane movement of TA legs. This is 25 times thicker than the thickest reactive-ion-etched α-Ta reported in the technical literature. Residual stress sensitivities to sputter parameters and to hydrogen incorporation are investigated and controlled. Subsequently, a V-shaped TA is fabricated and tested in air. Both conventional actuation by Joule heating and passive self-actuation are as predicted by models.

Numerical Analysis of Polymer Composites for Actuation

The design of a polymer composite actuator is essential for micro and nano applications. Thus, the composite material may deform or deflects as specific stimuli are applied, such as heat, electrical, light source, etc. The deformation of the composite material is caused by the type of stimulus applied. Hence, while it is heated, the expansion takes place quickly, and the heating is shut down, the material shrinks very slowly. In the present investigation, this phenomenon is mainly studied in the actuation of composite beams. Numerical analysis of carbon black filled polymer composite beam expansion, and contraction is being analyzed in this research. The structure of the beam has been created, and the composite properties are incorporated into the beam, and the uniform heat source is applied on to the surface of the beam. The heating and cooling of the composite material predict the increase and decrease in the temperature of the beam. The numerical analysis of the temperature-dependent expansion and contraction of the composite beam has been carried out successfully. An increase in temperature is observed to signify the slight expansion in the composite beam, whereas the contraction of the composite beam takes a longer time to reach room temperature. Also, the increase in the content of the filler leads to a decrease in the expansion of the composite beam. The numerical simulation of the polymer composite thus provides a solid platform for the experimental study of thermal actuators.

Fabrication and Characterization of Nanoscale Shape Memory Alloy MEMS Actuators

The miniaturization of engineering devices has created interest in new actuation methods capable of large displacements and high frequency responses. Shape memory alloy (SMA) thin films have exhibited one of the highest power densities of any material used in these actuation schemes and can thermally recovery strains of up to 10%. Homogenous SMA films can experience reversible shape memory effect, but without some sort of physical biasing mechanism, the effect is only one-way. SMA films mated in a multi-layer stack have the appealing feature of an intrinsic two-way shape memory effect (SME). In this work, we developed a near-equiatomic NiTi magnetron co-sputtering process and characterized shape memory effects. We mated these SMA films in several “bimorph” configurations to induce out of plane curvature in the low-temperature Martensite phase. We quantify the curvature radius vs. temperature on MEMS device structures to elucidate a relationship between residual stress, recovery stress, radius of curvature, and degree of unfolding. We fabricated and tested laser-irradiated and joule heated SMA MEMS actuators to enable rapid actuation of NiTi MEMS devices, demonstrating some of the lowest powers (5–15 mW) and operating frequencies (1–3 kHz) ever reported for SMA or other thermal actuators.