Feedback control of growth rate and surface roughness in thin film growth

2004 ◽  
Author(s):  
Yiming Lou ◽  
P.D. Christofides
Keyword(s):  
Thin Film ◽  
Growth Rate ◽  
Surface Roughness ◽  
Feedback Control ◽  
Film Growth ◽  
Thin Film Growth

Feedback control of growth rate and surface roughness in thin film growth

AIChE Journal ◽  
2003 ◽  
Vol 49 (8) ◽  
pp. 2099-2113 ◽  
Author(s):  
Yiming Lou ◽  
Panagiotis D. Christofides
Keyword(s):  
Thin Film ◽  
Growth Rate ◽  
Surface Roughness ◽  
Feedback Control ◽  
Film Growth ◽  
Thin Film Growth

Regulation of film thickness, surface roughness and porosity in thin film growth using deposition rate

2009 ◽  
Vol 64 (17) ◽  
pp. 3903-3913 ◽  
Author(s):  
Gangshi Hu ◽  
Gerassimos Orkoulas ◽  
Panagiotis D. Christofides
Keyword(s):  
Thin Film ◽  
Surface Roughness ◽  
Film Thickness ◽  
Deposition Rate ◽  
Film Growth ◽  
Thin Film Growth

Effects of Tris(tert-pentoxy)silanol Purge Time on SiO2 Thin-Film Growth Rate in Rapid Atomic Layer Deposition

2013 ◽  
Vol 2 (10) ◽  
pp. P91-P93 ◽  
Author(s):  
J. R. Kim ◽  
H. Lim ◽  
S. Park ◽  
Y. J. Choi ◽  
S. Suh ◽  
...  
Keyword(s):  
Thin Film ◽  
Growth Rate ◽  
Atomic Layer Deposition ◽  
Film Growth ◽  
Atomic Layer ◽  
Thin Film Growth ◽  
Film Growth Rate ◽  
Sio2 Thin Film ◽  
Layer Deposition

Study of Photo-Induced Thin Film Growth on Cds Substrates.*

1983 ◽  
Vol 29 ◽  
Author(s):  
C. Arnone ◽  
C. Call' ◽  
S. Riva-Sanseverino
Keyword(s):  
Thin Film ◽  
Growth Rate ◽  
Single Crystal ◽  
Absorption Edge ◽  
Film Growth ◽  
Thin Film Growth ◽  
Amorphous Thin Film ◽  
Maximum Light

ABSTRACTPhoto-induced growth of ZnS on CdS has been studied using amorphous (thin film) and single-crystal substrates. The effect has been found to occur for light of wavelength shorter than the CdS absorption edge; a maximum light-induced thickness enhancement of 700 Å has been obtained for the ZnS film, with a growth rate of 2000 Å/min. The lightinduced growth, with its observed “memory” of several minutes is consistent with photo-desorption of an adlayer.

An SDRE-Based Approach for HIV Feedback Control and Control of Thin Film Growth in a CVD Reactor

2011 ◽  
Vol 44 (1) ◽  
pp. 9601-9606 ◽  
Author(s):  
H.T. Banks ◽  
S.C. Beeler ◽  
Hee-Dae Kwon ◽  
B.M. Lewis ◽  
J.A. Toivanen ◽  
...  
Keyword(s):  
Thin Film ◽  
Feedback Control ◽  
Film Growth ◽  
Thin Film Growth ◽  
And Control
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