An Illuminating System of a 100-kV Analytical Electron Microscope with a Field-Emission Electron Gun
Our aim was to design a microscope for application in both the classical transmission electron microscopy (CTEM) and in the analytical electron microscopy having in the scanning modes (SEM, STEM) a resolving power approaching that in the CTEM. The problem can be optimally solved by using the field emission source of electrons. The illuminating system and the objective lens have the following parameters:a) The resolving power of the objective lens in the transmission mode is as high as 3.5 Å.b) The optical aberrations of the pre—field of the objective lens and of the set of condenser lenses allow a resolution of approx. 5 Å to be achieved in the scanning mode.c) The illuminated area of the specimen observed in the transmission mode is large enough to allow operation with the objective lens switched on at a magnification 1000 x.