Spectroscopy and Imaging With Energy-Filtering Tems: Parameters That Matter
Spectroscopy and imaging techniques based on electron energy-losses (EELS), which are accessible through energy-filtering transmission electron microscopes (EFTEMs), have proven to be important tools in both materials and life science investigations.The two most widely used techniques on commercially available EFTEMs are elastic imaging and elemental mapping. Elastic imaging enhances image resolution and contrast by extracting the zero-loss signal and eliminating the inelastic background, whereas elemental mapping, which involves signals coming from element-specific inner-shell ionization edges, is employed to form two dimensional elemental distribution images. In both cases relatively large energy windows of a range of 10 to 30eVare typically used to form energy-filtered images with usually low to moderately high magnifications.There is however much more information available in an EELS spectrum, which is contained in the detailed fine structure within 0-20eV of a core excitation edge (ELNES) or in the very low energy-loss up to 5eV.