Dual Lens Electron Holography, Scanning Capacitance Microscopy (SCM), Scanning Spreading Resistance Microscopy (SSRM) Comparison for Semiconductor 2-D Junction Characterization
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2002 ◽
Vol 20
(5)
◽
pp. 2126
◽
2003 ◽
Vol 21
(2)
◽
pp. 737
◽