Depth Profiles of Thin Films and Interfaces by the Elastic Recoil Detection Technique

ACS Symposium Series - Metallization of Polymers ◽

10.1021/bk-1990-0440.ch006 ◽

1990 ◽

pp. 88-109 ◽

Author(s):

S. C. Gujrathi

Keyword(s):

Detection Technique ◽

Elastic Recoil ◽

Elastic Recoil Detection ◽

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Depth profiling of deuterium implanted in thin films by the elastic recoil detection technique of transmission geometry

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/0168-583x(90)90165-q ◽

1990 ◽

Vol 48 (1-4) ◽

pp. 478-481 ◽

Author(s):

S. Morimoto ◽

S. Nagata ◽

S. Yamaguchi ◽

Y. Fujino

Keyword(s):

Depth Profiling ◽

Detection Technique ◽

Elastic Recoil ◽

Elastic Recoil Detection ◽

Transmission Geometry

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Depth profiling of hydrogen in thin films with the elastic recoil detection technique

Nuclear Instruments and Methods in Physics Research ◽

10.1016/0167-5087(83)91051-7 ◽

1983 ◽

Vol 218 (1-3) ◽

pp. 601-606 ◽

Author(s):

Huan-sheng Cheng ◽

Zhu-Ying Zhou ◽

Fu-Chia Yang ◽

Zhi-Wei Xu ◽

Yue-Hua Ren

Keyword(s):

Depth Profiling ◽

Detection Technique ◽

Elastic Recoil ◽

Elastic Recoil Detection

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Hydrogen profiling by elastic recoil detection in microcrystalline germanium thin films

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.577811 ◽

1992 ◽

Vol 10 (6) ◽

pp. 3517-3521 ◽

Author(s):

C. Godet ◽

P. Roca i Cabarrocas ◽

S. C. Gujrathi ◽

P. A. Burret

Keyword(s):

Elastic Recoil ◽

Elastic Recoil Detection

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Study on the hydrogen depth profiles in amorphous silicon films by elastic recoil detection

Vacuum ◽

10.1016/0042-207x(93)90346-c ◽

1993 ◽

Vol 44 (11-12) ◽

pp. 1193-1196 ◽

Author(s):

Liao Changgeng ◽

Wang Yongqiang ◽

Yang Shengsheng ◽

Jiang Hui ◽

Zheng Zhihao

Keyword(s):

Amorphous Silicon ◽

Silicon Films ◽

Elastic Recoil ◽

Elastic Recoil Detection ◽

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High resolution elastic recoil detection analysis of polystyrene depth profiles using carbon ions

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/s0168-583x(98)00344-9 ◽

1998 ◽

Vol 143 (3) ◽

pp. 371-380 ◽

Author(s):

Mark Geoghegan ◽

François Abel

Keyword(s):

High Resolution ◽

Carbon Ions ◽

Elastic Recoil ◽

Elastic Recoil Detection Analysis ◽

Elastic Recoil Detection ◽

Depth Profiles ◽

Detection Analysis

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Rutherford forward scattering and elastic recoil detection (RFSERD) as a method for characterizing ultra-thin films

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/j.nimb.2014.02.038 ◽

2014 ◽

Vol 332 ◽

pp. 99-102 ◽

Author(s):

Andrew J. Lohn ◽

Barney L. Doyle ◽

Gregory J. Stein ◽

Patrick R. Mickel ◽

Jim E. Stevens ◽

...

Keyword(s):

Forward Scattering ◽

Elastic Recoil ◽

Elastic Recoil Detection

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Quantitative compositional depth profiling of Si1−x−yGexCy thin films by simultaneous elastic recoil detection and Rutherford backscattering spectrometry

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/s0168-583x(97)00881-1 ◽

1998 ◽

Vol 136-138 ◽

pp. 654-660 ◽

Author(s):

S.C. Gujrathi ◽

S. Roorda ◽

J.G. D'Arcy ◽

Randall J. Pflueger ◽

P. Desjardins ◽

...

Keyword(s):

Rutherford Backscattering Spectrometry ◽

Depth Profiling ◽

Rutherford Backscattering ◽

Elastic Recoil ◽

Elastic Recoil Detection ◽

Compositional Depth Profiling

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Quantitative analysis of hydrogen in thin films using Time-of-Flight Elastic Recoil Detection Analysis

Thin Solid Films ◽

10.1016/j.tsf.2009.07.196 ◽

2010 ◽

Vol 518 (10) ◽

pp. 2617-2622 ◽

Author(s):

Zdravko Siketić ◽

Iva Bogdanović Radović ◽

Milko Jakšić

Keyword(s):

Quantitative Analysis ◽

Time Of Flight ◽

Elastic Recoil ◽

Elastic Recoil Detection Analysis ◽

Elastic Recoil Detection ◽

Detection Analysis

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Analysis of hydrogen in corrosion product films on amorphous alloy using the elastic recoil detection technique

Nuclear Instruments and Methods in Physics Research ◽

10.1016/0167-5087(83)91050-5 ◽

1983 ◽

Vol 218 (1-3) ◽

pp. 598-600 ◽

Author(s):

S. Yamaguchi ◽

Y. Fujino ◽

S. Nagata ◽

H. Kaneko ◽

K. Hashimoto ◽

...

Keyword(s):

Amorphous Alloy ◽

Corrosion Product ◽

Detection Technique ◽

Elastic Recoil ◽

Elastic Recoil Detection

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Effet d'une pulvérisation de l'antimoine dans le a-Si: H

Canadian Journal of Physics ◽

10.1139/p89-176 ◽

1989 ◽

Vol 67 (10) ◽

pp. 1007-1010

Author(s):

Y. Diawara ◽

J. F. Currie ◽

S. C. Gujrathi ◽

K. Oxorn

Keyword(s):

Chemical Composition ◽

Infrared Absorption ◽

Amorphous Film ◽

Detection Technique ◽

Elastic Recoil ◽

Cathode Sputtering ◽

Elastic Recoil Detection ◽

Rapid Annealing ◽

Precise Analysis ◽

Absorption Measurements

Cathode-sputtering of antimony in a-Si:H yields an amorphous film more conductive than intrinsic a-Si:H. A rapid annealing of the film allows us to increase its conductivity and to observe a dehydrogenation by infrared absorption measurements and by the elastic recoil detection technique. The latter method also gave us a precise analysis of the chemical composition of the amorphous film.[Journal translation]

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