In Situ Reaction Mechanism Studies on the New tBuN=M(NEt2)3 -Water and tBuN=M(NEt2)3 - Ozone (M = Nb,Ta) Atomic Layer Deposition Processes
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2014 ◽
Vol 32
(1)
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pp. 01A121
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2013 ◽
Vol 117
(27)
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pp. 14241-14246
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2010 ◽
Vol 2
(2)
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pp. 347-350
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