In situ reaction mechanism studies on the Ti(NMe2)2(OiPr)2-D2O and Ti(OiPr)3[MeC(NiPr)2]-D2O atomic layer deposition processes
2014 ◽
Vol 32
(1)
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pp. 01A121
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2013 ◽
Vol 117
(27)
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pp. 14241-14246
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2010 ◽
Vol 2
(2)
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pp. 347-350
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