In situ reaction mechanism studies of plasma-assisted atomic layer deposition of Al2O3
2006 ◽
Vol 89
(13)
◽
pp. 131505
◽
S. B. S. Heil
◽
P. Kudlacek
◽
E. Langereis
◽
R. Engeln
◽
M. C. M. van de Sanden
◽
...
2005 ◽
Vol 21
(8)
◽
pp. 3498-3502
◽
Raija Matero
◽
Antti Rahtu
◽
Mikko Ritala
2013 ◽
Vol 117
(27)
◽
pp. 14241-14246
◽
Yoann Tomczak
◽
Kjell Knapas
◽
Markku Sundberg
◽
Markku Leskelä
◽
Mikko Ritala
2008 ◽
Vol 20
(17)
◽
pp. 5698-5705
◽
Kjell Knapas
◽
Mikko Ritala
2011 ◽
Vol 23
(11)
◽
pp. 2766-2771
◽
Kjell Knapas
◽
Mikko Ritala
2020 ◽
Vol 32
(19)
◽
pp. 8120-8128
Heta-Elisa Nieminen
◽
Mikko Kaipio
◽
Mikko Ritala
2012 ◽
Vol 24
(9)
◽
pp. 1555-1561
◽
Yoann Tomczak
◽
Kjell Knapas
◽
Markku Sundberg
◽
Markku Leskelä
◽
Mikko Ritala
2012 ◽
Vol 24
(20)
◽
pp. 3859-3867
◽
Yoann Tomczak
◽
Kjell Knapas
◽
Suvi Haukka
◽
Marianna Kemell
◽
Mikko Heikkilä
◽
...
2010 ◽
Vol 22
(4)
◽
pp. 1386-1391
◽
Kjell Knapas
◽
Timo Hatanpää
◽
Mikko Ritala
◽
Markku Leskelä
2010 ◽
Vol 2
(2)
◽
pp. 347-350
◽
Martin Rose
◽
Jaakko Niinistö
◽
Ingolf Endler
◽
Johann W. Bartha
◽
Peter Kücher
◽
...
2014 ◽
Vol 32
(1)
◽
pp. 01A121
◽
Yoann Tomczak
◽
Kjell Knapas
◽
Markku Leskelä
◽
Mikko Ritala