Metalorganic chemical vapor deposition of non-GST chalcogenide materials for phase change memory applications

2010 ◽  
Vol 20 (9) ◽  
pp. 1751 ◽  
Author(s):  
Jun-Ku Ahn ◽  
Kyoung-Woo Park ◽  
Sung-Gi Hur ◽  
Nak-Jin Seong ◽  
Chung-Soo Kim ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Phase Change ◽  
Vapor Deposition ◽  
Metalorganic Chemical Vapor Deposition ◽  
Phase Change Memory ◽  
Chemical Vapor ◽  
Memory Applications ◽  
Chalcogenide Materials ◽  
Change Memory ◽  
Metalorganic Chemical

Hot-Wire Chemical Vapor Deposition of Chalcogenide Materials for Phase Change Memory Applications

2008 ◽  
Vol 20 (11) ◽  
pp. 3557-3559 ◽  
Author(s):  
Adulfas Abrutis ◽  
Valentina Plausinaitiene ◽  
Martynas Skapas ◽  
Claudia Wiemer ◽  
Olivier Salicio ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Phase Change ◽  
Vapor Deposition ◽  
Phase Change Memory ◽  
Chemical Vapor ◽  
Hot Wire ◽  
Memory Applications ◽  
Chalcogenide Materials ◽  
Change Memory

Phase Change Memory using InSbTe Chalcogenide Materials Deposited by Metal-organic Chemical Vapor Deposition

2019 ◽  
Vol 25 (8) ◽  
pp. 1129-1133 ◽  
Author(s):  
Jun-Ku Ahn ◽  
Kyung-Woo Park ◽  
Hyun-June Jung ◽  
Sri-Venkata Pammi ◽  
Sung-Gi Hur ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Phase Change ◽  
Vapor Deposition ◽  
Phase Change Memory ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Metal Organic ◽  
Chalcogenide Materials ◽  
Organic Chemical Vapor Deposition ◽  
Change Memory

Plasma Enhanced Chemical Vapor Deposition of Conformal GeTe Layer for Phase Change Memory Applications

2012 ◽  
Vol 1 (6) ◽  
pp. Q119-Q122 ◽  
Author(s):  
Emmanuel Gourvest ◽  
Christophe Vallée ◽  
Philippe Michallon ◽  
Romuald Blanc ◽  
Raluca Tiron ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Phase Change ◽  
Vapor Deposition ◽  
Phase Change Memory ◽  
Chemical Vapor ◽  
Memory Applications ◽  
Change Memory

Germanium antimony lateral nanowire phase change memory by chemical vapor deposition

2013 ◽  
Vol 250 (5) ◽  
pp. 994-998 ◽  
Author(s):  
Behrad Gholipour ◽  
Chung-Che Huang ◽  
Jun-Yu Ou ◽  
Daniel W. Hewak
Keyword(s):  
Chemical Vapor Deposition ◽  
Phase Change ◽  
Vapor Deposition ◽  
Phase Change Memory ◽  
Chemical Vapor ◽  
Change Memory

Chemical Vapor Deposition GeTe/Sb2Te3 Super-Lattice Phase Change Memory

2013 ◽  
Author(s):  
M. Kitamura ◽  
T. Morikawa ◽  
T. Ohyanagi ◽  
M. Tai ◽  
M. Kinoshita ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Phase Change ◽  
Vapor Deposition ◽  
Phase Change Memory ◽  
Chemical Vapor ◽  
Super Lattice ◽  
Change Memory

Metalorganic chemical vapor deposition of lead-free ferroelectric BiFeO3 films for memory applications

2005 ◽  
Vol 87 (10) ◽  
pp. 102903 ◽  
Author(s):  
S. Y. Yang ◽  
F. Zavaliche ◽  
L. Mohaddes-Ardabili ◽  
V. Vaithyanathan ◽  
D. G. Schlom ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Metalorganic Chemical Vapor Deposition ◽  
Chemical Vapor ◽  
Lead Free ◽  
Memory Applications ◽  
Metalorganic Chemical

Chemical Vapor Deposition of GeSbTe Thin Films for Next-Generation Phase Change Memory

2010 ◽  
Vol 49 (5) ◽  
pp. 05FF06 ◽  
Author(s):  
Hideaki Machida ◽  
Seichi Hamada ◽  
Takafumi Horiike ◽  
Masato Ishikawa ◽  
Atsushi Ogura ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Phase Change ◽  
Vapor Deposition ◽  
Phase Change Memory ◽  
Chemical Vapor ◽  
Next Generation ◽  
Change Memory
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