Phase Change Memory Using InSbTe Chalcogenide Materials Deposited by Metal-Organic Chemical Vapor Deposition

ECS Meeting Abstracts ◽

10.1149/ma2009-02/34/2642 ◽

2009 ◽

Keyword(s):

Chemical Vapor Deposition ◽

Phase Change ◽

Vapor Deposition ◽

Phase Change Memory ◽

Chemical Vapor ◽

Organic Chemical ◽

Metal Organic ◽

Chalcogenide Materials ◽

Organic Chemical Vapor Deposition ◽

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Phase Change Memory using InSbTe Chalcogenide Materials Deposited by Metal-organic Chemical Vapor Deposition

ECS Transactions ◽

10.1149/1.3207716 ◽

2019 ◽

Vol 25 (8) ◽

pp. 1129-1133 ◽

Author(s):

Jun-Ku Ahn ◽

Kyung-Woo Park ◽

Hyun-June Jung ◽

Sri-Venkata Pammi ◽

Sung-Gi Hur ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Phase Change ◽

Vapor Deposition ◽

Phase Change Memory ◽

Chemical Vapor ◽

Organic Chemical ◽

Metal Organic ◽

Chalcogenide Materials ◽

Organic Chemical Vapor Deposition ◽

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Structural properties of Ge2Sb2Te5 thin films by metal organic chemical vapor deposition for phase change memory applications

Applied Physics Letters ◽

10.1063/1.2338586 ◽

2006 ◽

Vol 89 (10) ◽

pp. 102107 ◽

Author(s):

Ran-Young Kim ◽

Ho-Gi Kim ◽

Soon-Gil Yoon

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Phase Change Memory ◽

Chemical Vapor ◽

Organic Chemical ◽

Metal Organic ◽

Memory Applications ◽

Organic Chemical Vapor Deposition ◽

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Metalorganic chemical vapor deposition of non-GST chalcogenide materials for phase change memory applications

Journal of Materials Chemistry ◽

10.1039/b922398c ◽

2010 ◽

Vol 20 (9) ◽

pp. 1751 ◽

Author(s):

Jun-Ku Ahn ◽

Kyoung-Woo Park ◽

Sung-Gi Hur ◽

Nak-Jin Seong ◽

Chung-Soo Kim ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Phase Change ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Phase Change Memory ◽

Chemical Vapor ◽

Memory Applications ◽

Chalcogenide Materials ◽

Change Memory ◽

Metalorganic Chemical

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Chemical Vapor Deposition in Ultra Scale Integration Cell using Chalcogenide Materials for Phase Change Memory

ECS Meeting Abstracts ◽

10.1149/ma2009-01/24/1009 ◽

2009 ◽

Keyword(s):

Chemical Vapor Deposition ◽

Phase Change ◽

Vapor Deposition ◽

Phase Change Memory ◽

Chemical Vapor ◽

Scale Integration ◽

Chalcogenide Materials ◽

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Hot-Wire Chemical Vapor Deposition of Chalcogenide Materials for Phase Change Memory Applications

Chemistry of Materials ◽

10.1021/cm8004584 ◽

2008 ◽

Vol 20 (11) ◽

pp. 3557-3559 ◽

Author(s):

Adulfas Abrutis ◽

Valentina Plausinaitiene ◽

Martynas Skapas ◽

Claudia Wiemer ◽

Olivier Salicio ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Phase Change ◽

Vapor Deposition ◽

Phase Change Memory ◽

Chemical Vapor ◽

Hot Wire ◽

Memory Applications ◽

Chalcogenide Materials ◽

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Phase-Change InSbTe Nanowires Grown in Situ at Low Temperature by Metal−Organic Chemical Vapor Deposition

Nano Letters ◽

10.1021/nl903188z ◽

2010 ◽

Vol 10 (2) ◽

pp. 472-477 ◽

Author(s):

Jun-Ku Ahn ◽

Kyoung-Woo Park ◽

Hyun-June Jung ◽

Soon-Gil Yoon

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Phase Change ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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Amorphous thin GeSbTe phase-change films prepared by radical-assisted metal-organic chemical vapor deposition

Thin Solid Films ◽

10.1016/j.tsf.2015.03.034 ◽

2015 ◽

Vol 583 ◽

pp. 55-59 ◽

Author(s):

Yoshihisa Fujisaki ◽

Yoshitaka Sasago ◽

Takashi Kobayashi

Keyword(s):

Chemical Vapor Deposition ◽

Phase Change ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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Metal Organic Chemical Vapor Deposition of Phase Change Ge1Sb2Te4 Nanowires

Nano Letters ◽

10.1021/nl204301h ◽

2012 ◽

Vol 12 (3) ◽

pp. 1509-1515 ◽

Author(s):

Massimo Longo ◽

Roberto Fallica ◽

Claudia Wiemer ◽

Olivier Salicio ◽

Marco Fanciulli ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Phase Change ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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NUMERICAL VISUALIZATION OF THERMAL FLOW STRUCTURE AND CONCENTRATION CONTOURS IN METAL ORGANIC CHEMICAL VAPOR DEPOSITION REACTORS

Journal of Flow Visualization and Image Processing ◽

10.1615/jflowvisimageproc.v7.i1.20 ◽

2000 ◽

Vol 7 (1) ◽

pp. 12

Author(s):

R. Y. Tzong ◽

C. Y. Soong

Keyword(s):

Chemical Vapor Deposition ◽

Flow Structure ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Thermal Flow ◽

Numerical Visualization ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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Laser‐Assisted Metal–Organic Chemical Vapor Deposition of Gallium Nitride

physica status solidi (RRL) - Rapid Research Letters ◽

10.1002/pssr.202170024 ◽

2021 ◽

Vol 15 (6) ◽

pp. 2170024

Author(s):

Yuxuan Zhang ◽

Zhaoying Chen ◽

Kaitian Zhang ◽

Zixuan Feng ◽

Hongping Zhao

Keyword(s):

Gallium Nitride ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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