scholarly journals Depth profiling of low energy ion implantations in Si and Ge by means of micro-focused grazing emission X-ray fluorescence and grazing incidence X-ray fluorescence

2015 ◽  
Vol 30 (5) ◽  
pp. 1086-1099 ◽  
Author(s):  
Yves Kayser ◽  
Philipp Hönicke ◽  
Dariusz Banaś ◽  
Jean-Claude Dousse ◽  
Joanna Hoszowska ◽  
...  
Keyword(s):  
Depth Distribution ◽  
Depth Profiling ◽  
Grazing Incidence ◽  
Low Energy ◽  
X Ray ◽  
Non Destructive

Grazing XRF measurements allow for a non-destructive investigation of the depth distribution of ion implantations.

In-Depth Distribution of Stresses Measured by Multireflection Grazing Incidence Diffraction

2013 ◽  
Vol 772 ◽  
pp. 143-147
Author(s):  
Marianna Marciszko ◽  
Andrzej Stanisławczyk ◽  
Andrzej Baczmanski ◽  
Krzysztof Wierzbanowski ◽  
Wilfrid Seiler ◽  
...  
Keyword(s):  
Depth Distribution ◽  
Grazing Incidence ◽  
Inverse Laplace Transform ◽  
Stress Profile ◽  
X Ray Diffraction ◽  
X Ray ◽  
Grazing Incidence Diffraction ◽  
Destructive Analysis ◽  
Sample Range ◽  
Non Destructive

The geometry based on the multireflection grazing incidence X-ray diffraction (called the MGIXD method) can be applied to measure residual stresses. Using this method, it is possible to perform a non-destructive analysis of the heterogeneous stresses for different and well defined volumes below the surface of the sample (range of several mm). As the result the average values of stresses weighted by absorption of X-ray radiation are measured. In this work the stress profile as a function of depth for mechanically polished Ti and Al samples were calculated from MGIXD data using inverse Laplace transform.

Thermal Behaviour of Implanted Nitrogen and Accumulated Hydrogen in Titanium

1997 ◽  
Vol 504 ◽  
Author(s):  
M. Soltani-Farshi ◽  
H. Baumann ◽  
D. Rück ◽  
G. Walter ◽  
K. Bethge
Keyword(s):  
Ion Implantation ◽  
Depth Distribution ◽  
Depth Profiling ◽  
Grazing Incidence ◽  
X Ray Diffraction ◽  
Nitrogen Ion Implantation ◽  
X Ray ◽  
Depth Profiles ◽  
Hydrogen Accumulation ◽  
Nitrogen Ion

ABSTRACTThe influence of nitrogen ion implantation on the hydrogen accumulation in titanium was investigated as function of sample temperature and ion fluence. 150 keV nitrogen (15N) ions were implanted at different sample temperatures up to 700°C with fluences ranging from 1 × 1017 to 1 × 1018 ions/cm2. The amount of accumulated hydrogen and its depth distribution was measured quantitatively with the 15N depth profiling method. The implanted 15N depth profiles were measured by the reverse reaction 15N(p, αγ)12C at 429 keV. The binary phases of the implanted nitrogen with titanium are detected by grazing incidence x-ray diffraction. The results are compared with those obtained for samples implanted at RT and subsequently thermally treated.

Rapid, Non-destructive Inspection and Classification of Inhalation Blisters Using Low-Energy X-ray Imaging

2018 ◽  
Vol 13 (3) ◽  
pp. 270-282 ◽  
Author(s):  
Nagaraja Rao ◽  
Brian Ament ◽  
Richard Parmee ◽  
Jonathan Cameron ◽  
Martin Mayo
Keyword(s):  
Low Energy ◽  
X Ray ◽  
X Ray Imaging ◽  
Non Destructive

Grazing Incidence X-Ray Fluorescence Analysis using Synchrotron Radiation

1991 ◽  
Vol 35 (B) ◽  
pp. 795-806
Author(s):  
Atsuo Iida
Keyword(s):  
Synchrotron Radiation ◽  
Elemental Concentration ◽  
Depth Distribution ◽  
Fluorescence Analysis ◽  
Grazing Incidence ◽  
Material Surface ◽  
Fluorescence Signal ◽  
Elemental Distribution ◽  
X Ray ◽  
Glancing Angle

AbstractThe X-ray fluorescence analysis of a trace element under a grazing incidence condition has been developed using synchrotron radiation. The interference effect plays an important role for determining the depth distribution of the elemental concentration. The elemental distribution above, on or below the material surface has been studied. The glancing angle dependence of the X-ray fluorescence signal around the critical angle strongly reflects the elemental distribution, and can be used to determine the position of the element of interest.

Non-destructive Surface Residual Stress Profiling by Multireflection Grazing Incidence X-Ray Diffraction: a 7050 Al Alloy Study

2020 ◽  
Vol 60 (4) ◽  
pp. 475-480
Author(s):  
V. A. N. Righetti ◽  
T. M. B. Campos ◽  
L. B. Robatto ◽  
R. R. Rego ◽  
G. P. Thim
Keyword(s):  
Residual Stress ◽  
Grazing Incidence ◽  
Al Alloy ◽  
X Ray Diffraction ◽  
Surface Residual Stress ◽  
X Ray ◽  
Non Destructive

Grazing-incidence X-Ray Analysis of Surfaces and Thin Films

1991 ◽  
Vol 35 (A) ◽  
pp. 143-150 ◽  
Author(s):  
T. C. Huang
Keyword(s):  
Thin Films ◽  
Depth Profiling ◽  
Grazing Incidence ◽  
Bragg Diffraction ◽  
Interface Roughness ◽  
Phase Identification ◽  
X Ray ◽  
Types Of Information

AbstractGrazing-incidence X-ray analysis techniques which are commonly used for the nondestructive characterization of surfaces and thin films are reviewed. The X-ray reflectivity technicue is used to study surface uniformity and oxidation, layer thickness and density, interface roughness and diffusion, etc. The grazing-incidence in-plane diffraction technique is used to determine in-plane crystallography of epitaxial films. The grazing-incidence asymmetric-Bragg diffraction is used for surface phase identification and structural depth profiling determination of polycrystalline films. Typical examples to illustrate the types of information that can be obtained by the techniques are presented.

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