Self-assembly nanostructured gold for high aspect ratio silicon microstructures by metal assisted chemical etching
Keyword(s):
Self-assembly Au nanostructures stabilize the catalyst during metal assisted chemical etching, improving the vertical profile of high aspect ratio Si dense micro-patterns on large area, such as diffraction gratings for X-ray phase contrast imaging.
2017 ◽
Vol 16
(4)
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pp. 567-573
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2018 ◽
Vol 28
(5)
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pp. 055006
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2014 ◽
Vol 24
(12)
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pp. 125026
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Keyword(s):
2015 ◽
Vol 4
(9)
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pp. P337-P346
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Keyword(s):
2014 ◽
Vol 6
(19)
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pp. 16782-16791
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