Influence of CH4–Ar ratios on the composition, microstructure and optical properties of Be2C films synthesized by DC reactive magnetron sputtering

RSC Advances ◽  
2016 ◽  
Vol 6 (45) ◽  
pp. 39444-39451 ◽  
Author(s):  
Yudan He ◽  
Jiangshan Luo ◽  
Kai Li ◽  
Bingchi Luo ◽  
Jiqiang Zhang ◽  
...  
Keyword(s):  
Optical Properties ◽  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Hydrocarbon Films ◽  
Dc Reactive Magnetron Sputtering ◽  
Main Component

XPS results revealed that CH content increased with the increasing of CH4–Ar ratios, meanwhile, Be2C was the main component in films with CH4–Ar ratios < 5% and hydrocarbon films were obtained when ratios exceed 15%.

Optical properties of CdIn2O4 thin films prepared by DC reactive magnetron sputtering

2006 ◽  
Vol 297 (2) ◽  
pp. 411-418 ◽  
Author(s):  
F.F. Yang ◽  
L. Fang ◽  
S.F. Zhang ◽  
K.J. Liao ◽  
G.B. Liu ◽  
...  
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Dc Reactive Magnetron Sputtering
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