Atomic layer deposition of Al2O3 on MoS2, WS2, WSe2, and h-BN: surface coverage and adsorption energy
Keyword(s):
The adsorption energies of trimethyl-aluminum on 2D crystals are extracted by quantifying the surface coverage of Al2O3 grown by atomic layer deposition.
2012 ◽
Vol 47
(10)
◽
pp. 3004-3007
◽
Keyword(s):
Keyword(s):
Keyword(s):
2010 ◽
Vol 49
(11)
◽
pp. 111201
◽
Keyword(s):
2013 ◽
Vol 750-752
◽
pp. 1052-1056
◽
2006 ◽
Vol 12
(2-3)
◽
pp. 125-129
◽
Keyword(s):