Thin film piezoelectrics for bulk acoustic wave (BAW) acoustophoresis

Lab on a Chip ◽  
2018 ◽  
Vol 18 (23) ◽  
pp. 3655-3667 ◽  
Author(s):  
Peter Reichert ◽  
Dhananjay Deshmukh ◽  
Lukas Lebovitz ◽  
Jürg Dual
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Bulk Acoustic Wave ◽  
Fabrication And Characterization ◽  
Piezoelectric Devices

Design, fabrication and characterization of thin film piezoelectric devices for bulk acoustic wave acoustophoresis of micrometer-sized particles.

Performance Characterization of Thin AlN Films deposited on Mo Electrode for Thin-Film Bulk Acoustic-Wave Resonators

2004 ◽  
Vol 43 (8A) ◽  
pp. 5510-5515 ◽  
Author(s):  
Kok-Wan Tay ◽  
Cheng-Liang Huang ◽  
Long Wu ◽  
Meng-Shan Lin
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Bulk Acoustic Wave ◽  
Performance Characterization ◽  
Film Bulk ◽  
Acoustic Wave Resonators ◽  
Bulk Acoustic Wave Resonators

Fabrication and characterization of stacked ZnO and ZnOGa2O3 layers for the realization of bulk acoustic wave resonated membranes

2007 ◽  
Vol 38 (4-5) ◽  
pp. 538-546
Author(s):  
Y. Zaatar ◽  
R. Al Asmar ◽  
J. Podlecki ◽  
S. Youssef ◽  
M. Abdallah ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Bulk Acoustic Wave ◽  
Fabrication And Characterization

scholarly journals Selective normal mode excitation in multilayer thin film bulk acoustic wave resonators

2014 ◽  
Vol 105 (16) ◽  
pp. 162910 ◽  
Author(s):  
Andrey Kozyrev ◽  
Anatoly Mikhailov ◽  
Sergey Ptashnik ◽  
Peter K. Petrov ◽  
Neil Alford
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Normal Mode ◽  
Bulk Acoustic Wave ◽  
Multilayer Thin Film ◽  
Mode Excitation ◽  
Film Bulk ◽  
Acoustic Wave Resonators ◽  
Bulk Acoustic Wave Resonators

An analysis of an unbounded thin film bulk acoustic wave piezoelectric resonator with a circular driving electrode

2017 ◽  
Vol 56 (1) ◽  
pp. 11-19 ◽  
Author(s):  
Jing Liu ◽  
Tingfeng Ma ◽  
Jianke Du ◽  
Ji Wang ◽  
Jiashi Yang
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Bulk Acoustic Wave ◽  
Piezoelectric Resonator ◽  
Film Bulk

scholarly journals The thin film bulk acoustic wave resonator based on single-crystalline 43○Y-cut lithium niobate thin films

AIP Advances ◽  
2020 ◽  
Vol 10 (7) ◽  
pp. 075002
Author(s):  
Xiaoyuan Bai ◽  
Yao Shuai ◽  
Lu Lv ◽  
Ying Xing ◽  
Jiaoling Zhao ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Lithium Niobate ◽  
Acoustic Wave ◽  
Bulk Acoustic Wave ◽  
Single Crystalline ◽  
Bulk Acoustic Wave Resonator ◽  
Wave Resonator ◽  
Film Bulk
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