scholarly journals Nanoscale interface engineering for solid oxide fuel cells using atomic layer deposition

2022 ◽  
Author(s):  
Jongsu Seo ◽  
Seunghyun Kim ◽  
SungHyun Jeon ◽  
Suyeon Kim ◽  
Jeong Hwan Kim ◽  
...  

Atomic layer deposition (ALD), which is already actively used in the semiconductor industry, has been in the spotlight in various energy fields, such as batteries and fuel cells, given its...

2016 ◽  
Vol 75 (6) ◽  
pp. 195-202 ◽  
Author(s):  
J. F. Roeder ◽  
A. F. Zeberoff ◽  
P. C. Van Buskirk ◽  
A. Torabi ◽  
J. Barton ◽  
...  

Author(s):  
A. Walter ◽  
R. Xu ◽  
G. Jursich ◽  
C.G. Takoudis

Thin films of yttria-stabilized zirconium oxide (YSZ) were successfully deposited using atomic layer deposition (ALD) for use in solid oxide fuel cells (SOFCs). YSZ was deposited on p-Si(100) by ALD using Tris(isopropyl-cyclopentadienyl)yttrium [(iPrCp)3Y] and tris(dimethylamino)cyclopentadienylzirconim [ZyALD] as metal precursors and ozone as oxidant. The normalized ALD cycle ratio of yttria cycles / total cycles used in making these films was varied to investigate the tunability of this process. Spectral ellipsometry was used to measure the thickness of the films. X-ray photoelectron spectroscopy (XPS) analyses were used to evaluate the composition and binding environments of as-deposited YSZ films. The normalized cycle ratio and the yttrium atomic percentage (Y atoms / metal atoms) have a linear relationship with a strong correlation, implying excellent tunability for this process. The binding environment analyses determine the oxidation state of the metals and show that decreasing the cycle ratio decreases the extent of yttrium hydroxidation.


2011 ◽  
Vol 21 (29) ◽  
pp. 10903 ◽  
Author(s):  
Zeng Fan ◽  
Cheng-Chieh Chao ◽  
Faraz Hossein-Babaei ◽  
Fritz B. Prinz

2014 ◽  
Vol 253 ◽  
pp. 114-122 ◽  
Author(s):  
Youngseok Jee ◽  
Gu Young Cho ◽  
Jihwan An ◽  
Hae-Ryoung Kim ◽  
Ji-Won Son ◽  
...  

2008 ◽  
Vol 179 (27-32) ◽  
pp. 1540-1544 ◽  
Author(s):  
Timothy P. Holme ◽  
Changkeun Lee ◽  
Fritz B. Prinz

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