Synthesis of ZnO sol–gel thin-films CMOS-Compatible
A low-cost sol–gel spin-coating technique is used in this study for the simple synthesis of eco-friendly ZnO multilayer films deposited on (100)-oriented silicon substrates ranging from 150 to 600 nm by adjusting the spin coating rate.
2013 ◽
Vol 67
(1)
◽
pp. 50-55
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