A High Precision Software Compensation Algorithm for Silicon Piezoresistive Pressure Sensor

2019 ◽  
Vol 28 (4) ◽  
pp. 748-753
Author(s):  
Tianshu Wu ◽  
Shuyu Chen ◽  
Peng Wu ◽  
Shaozhong Nie
Keyword(s):  
High Precision ◽  
Pressure Sensor ◽  
Compensation Algorithm ◽  
Piezoresistive Pressure Sensor ◽  
Software Compensation

scholarly journals High-precision optical fiber pressure sensor using frequency-modulated continuous-wave laser interference

AIP Advances ◽  
2021 ◽  
Vol 11 (2) ◽  
pp. 025038
Author(s):  
Lang Bai ◽  
Gang Zheng ◽  
Bin Sun ◽  
Xiongxing Zhang ◽  
Qiming Sheng ◽  
...  
Keyword(s):  
Optical Fiber ◽  
High Precision ◽  
Pressure Sensor ◽  
Continuous Wave ◽  
Continuous Wave Laser ◽  
Laser Interference ◽  
Wave Laser

Design and Simulation of Pressure Sensor for Ocean Depth Measurements

2013 ◽  
Vol 313-314 ◽  
pp. 666-670 ◽  
Author(s):  
K.J. Suja ◽  
Bhanu Pratap Chaudhary ◽  
Rama Komaragiri
Keyword(s):  
Pressure Sensor ◽  
Integrated Circuit ◽  
Output Voltage ◽  
Pressure Sensors ◽  
Micro Electro Mechanical System ◽  
Constant Thickness ◽  
Piezoresistive Pressure Sensor ◽  
Wide Pressure Range ◽  
Processing Techniques ◽  
Wide Pressure

MEMS (Micro Electro Mechanical System) are usually defined as highly miniaturized devices combining both electrical and mechanical components that are fabricated using integrated circuit batch processing techniques. Pressure sensors are usually manufactured using square or circular diaphragms of constant thickness in the order of few microns. In this work, a comparison between circular diaphragm and square diaphragm indicates that square diaphragm has better perspectives. A new method for designing diaphragm of the Piezoresistive pressure sensor for linearity over a wide pressure range (approximately double) is designed, simulated and compared with existing single diaphragm design with respect to diaphragm deflection and sensor output voltage.

Study and Analysis of MEMS Pressure Sensor Based on Applied Mechanics

2013 ◽  
Vol 771 ◽  
pp. 159-162
Author(s):  
Li Feng Qi ◽  
Zhi Min Liu ◽  
Xing Ye Xu ◽  
Guan Zhong Chen ◽  
Xue Qing
Keyword(s):  
Finite Element Analysis ◽  
Pressure Sensor ◽  
High Sensitivity ◽  
Scientific Basis ◽  
Sensor Chip ◽  
Applied Mechanics ◽  
Beam Structure ◽  
Element Analysis ◽  
Sensor Development ◽  
Piezoresistive Pressure Sensor

The relative research of low range and high anti-overload piezoresistive pressure sensor is carried out in this paper and a new kind of sensor chip structure, the double ends-four beam structure, is proposed. Trough the analysis, the sensor chip structure designed in this paper has high sensitivity and linearity. The chip structure is specially suit for the micro-pressure sensor. The theoretical analysis and finite element analysis is taken in this paper, which provide important scientific basis for the pressure sensor development.

Sign in / Sign up

Export Citation Format

Share Document