Characterization of a hydrogen hollow cathode plasma by two-photon polarization spectroscopy

Author(s):  
Ana B. Gonzalo
2004 ◽  
Vol 808 ◽  
Author(s):  
R. J. Soukup ◽  
N. J. Ianno ◽  
Scott A. Darveau ◽  
Christopher L. Exstrom

ABSTRACTUsing a novel hollow cathode plasma-jet reactive sputtering system in which an intense plasma, ignited in an Ar/H2 flow, is directed through silicon and germanium nozzles, a series of a-SiGe:H thin films have been prepared on silicon and glass substrates. These films have been optically characterized by infrared (IR) spectroscopy and spectroscopic ellipsometry (335-1000nm). Total hydrogen concentrations, as determined by FTIR, varied with deposition conditions and ranged from 2.5 × 1021 to 1.6 × 1022 atom cm−3 and correlated with secondary ion mass spectrometry (SIMS) elemental analyses to within 10%. Conductivity measurements in the dark and under simulated AM1 solar illumination have indicated that the films properties are very good. The light to dark conductivity ratio has consistently been greater than 1000 for films with band gaps down to 1.3 eV.


2011 ◽  
Vol 19 (15) ◽  
pp. 14249 ◽  
Author(s):  
H. Kumano ◽  
K. Matsuda ◽  
S. Ekuni ◽  
H. Sasakura ◽  
I. Suemune

1996 ◽  
Vol 129 (1-2) ◽  
pp. 38-43 ◽  
Author(s):  
C.F Kaminski ◽  
B Löfstedt ◽  
R Fritzon ◽  
M Aldén

2003 ◽  
Author(s):  
Andreas Steiger ◽  
M. I. de la Rosa ◽  
Klaus Gruetzmacher ◽  
Ana B. Gonzalo ◽  
Martina Steiger

2005 ◽  
Author(s):  
M. Kuwata-Gonokami ◽  
J. Iwamatsu ◽  
R. Shimano ◽  
H. Akiyama

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