Combined effects of argon addition and substrate bias on the formation of nanocrystalline diamond films by chemical vapor deposition

Journal of Applied Physics ◽

10.1063/1.1512320 ◽

2002 ◽

Vol 92 (9) ◽

pp. 4912-4917 ◽

Author(s):

Tien-Syh Yang ◽

Jir-Yon Lai ◽

Ming-Show Wong ◽

Chia-Liang Cheng

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Diamond Films ◽

Chemical Vapor ◽

Nanocrystalline Diamond ◽

Combined Effects ◽

Substrate Bias ◽

Nanocrystalline Diamond Films

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Substrate bias effect on the formation of nanocrystalline diamond films by microwave plasma-enhanced chemical vapor deposition

Journal of Applied Physics ◽

10.1063/1.1492864 ◽

2002 ◽

Vol 92 (4) ◽

pp. 2133-2138 ◽

Author(s):

Tien-Syh Yang ◽

Jir-Yon Lai ◽

Ming-Show Wong ◽

Chia-Liang Cheng

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Microwave Plasma ◽

Diamond Films ◽

Chemical Vapor ◽

Nanocrystalline Diamond ◽

Substrate Bias ◽

Bias Effect ◽

Nanocrystalline Diamond Films

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Study of Undoped Nanocrystalline Diamond Films Grown by Microwave Plasma-Assisted Chemical Vapor Deposition

Semiconductors ◽

10.1134/s106378262101019x ◽

2021 ◽

Vol 55 (1) ◽

pp. 66-75

Author(s):

A. L. Vikharev ◽

S. A. Bogdanov ◽

N. M. Ovechkin ◽

O. A. Ivanov ◽

D. B. Radishev ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Microwave Plasma ◽

Diamond Films ◽

Chemical Vapor ◽

Nanocrystalline Diamond ◽

Nanocrystalline Diamond Films

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Bulk and surface thermal stability of ultra nanocrystalline diamond films with 10–30 nm grain size prepared by chemical vapor deposition

Journal of Applied Physics ◽

10.1063/1.3359714 ◽

2010 ◽

Vol 107 (9) ◽

pp. 093521 ◽

Author(s):

Sh. Michaelson ◽

A. Stacey ◽

J. Orwa ◽

A. Cimmino ◽

S. Prawer ◽

...

Keyword(s):

Thermal Stability ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Diamond Films ◽

Chemical Vapor ◽

Nanocrystalline Diamond ◽

Nanocrystalline Diamond Films ◽

Thermal Stability Of

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Doping of vanadium to nanocrystalline diamond films by hot filament chemical vapor deposition

Nanoscale Research Letters ◽

10.1186/1556-276x-7-441 ◽

2012 ◽

Vol 7 (1) ◽

Author(s):

Yaozhong Zhang ◽

Liying Zhang ◽

Jiang Zhao ◽

Liang Wang ◽

Gang Zhao ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Diamond Films ◽

Chemical Vapor ◽

Nanocrystalline Diamond ◽

Nanocrystalline Diamond Films ◽

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Control of plasma space potentials and chemical vapor deposition of nanocrystalline diamond films in surface-wave excited low-pressure plasmas

Journal of Applied Physics ◽

10.1063/1.2409761 ◽

2007 ◽

Vol 101 (2) ◽

pp. 023301 ◽

Author(s):

Jaeho Kim ◽

Makoto Katsurai

Keyword(s):

Chemical Vapor Deposition ◽

Surface Wave ◽

Vapor Deposition ◽

Diamond Films ◽

Chemical Vapor ◽

Low Pressure ◽

Nanocrystalline Diamond ◽

Nanocrystalline Diamond Films

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Cytotoxicity of Boron-Doped Nanocrystalline Diamond Films Prepared by Microwave Plasma Chemical Vapor Deposition

Plasma Science and Technology ◽

10.1088/1009-0630/17/7/08 ◽

2015 ◽

Vol 17 (7) ◽

pp. 574-578

Author(s):

Dan Liu ◽

Li Gou ◽

Junguo Ran ◽

Hong Zhu ◽

Xiang Zhang

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Microwave Plasma ◽

Diamond Films ◽

Chemical Vapor ◽

Nanocrystalline Diamond ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition ◽

Boron Doped ◽

Nanocrystalline Diamond Films

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Tribological properties of nanocrystalline diamond films deposited by hot filament chemical vapor deposition

AIP Advances ◽

10.1063/1.4751272 ◽

2012 ◽

Vol 2 (3) ◽

pp. 032164 ◽

Author(s):

N. Kumar ◽

K. Panda ◽

S. Dash ◽

C. Popov ◽

J. P. Reithmaier ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Tribological Properties ◽

Vapor Deposition ◽

Diamond Films ◽

Chemical Vapor ◽

Nanocrystalline Diamond ◽

Nanocrystalline Diamond Films ◽

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Characterization of boron-doped micro- and nanocrystalline diamond films deposited by wafer-scale hot filament chemical vapor deposition for MEMS applications

Diamond and Related Materials ◽

10.1016/j.diamond.2007.09.010 ◽

2008 ◽

Vol 17 (1) ◽

pp. 23-28 ◽

Author(s):

Jingchun Zhang ◽

Jerry W. Zimmer ◽

Roger T. Howe ◽

Roya Maboudian

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Diamond Films ◽

Chemical Vapor ◽

Nanocrystalline Diamond ◽

Wafer Scale ◽

Boron Doped ◽

Nanocrystalline Diamond Films ◽

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Ultrafine Patterning of Nanocrystalline Diamond Films Grown by Microwave Plasma-Assisted Chemical Vapor Deposition

Japanese Journal of Applied Physics ◽

10.1143/jjap.46.6267 ◽

2007 ◽

Vol 46 (9B) ◽

pp. 6267-6271 ◽

Author(s):

Hidenori Gamo ◽

Kentaro Shimada ◽

Mikka Nishitani-Gamo ◽

Toshihiro Ando

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Microwave Plasma ◽

Diamond Films ◽

Chemical Vapor ◽

Nanocrystalline Diamond ◽

Nanocrystalline Diamond Films

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Growth dynamics of nanocrystalline diamond films produced by microwave plasma enhanced chemical vapor deposition in methane/hydrogen/air mixture: Scaling analysis of surface morphology

Diamond and Related Materials ◽

10.1016/j.diamond.2015.07.002 ◽

2015 ◽

Vol 58 ◽

pp. 172-179 ◽

Author(s):

V. Podgursky ◽

A. Bogatov ◽

V. Sedov ◽

I. Sildos ◽

A. Mere ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Surface Morphology ◽

Vapor Deposition ◽

Microwave Plasma ◽

Diamond Films ◽

Growth Dynamics ◽

Chemical Vapor ◽

Nanocrystalline Diamond ◽

Scaling Analysis ◽

Nanocrystalline Diamond Films

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