Control of plasma space potentials and chemical vapor deposition of nanocrystalline diamond films in surface-wave excited low-pressure plasmas

2007 ◽  
Vol 101 (2) ◽  
pp. 023301 ◽  
Author(s):  
Jaeho Kim ◽  
Makoto Katsurai
Keyword(s):  
Chemical Vapor Deposition ◽  
Surface Wave ◽  
Vapor Deposition ◽  
Diamond Films ◽  
Chemical Vapor ◽  
Low Pressure ◽  
Nanocrystalline Diamond ◽  
Nanocrystalline Diamond Films

Study of Undoped Nanocrystalline Diamond Films Grown by Microwave Plasma-Assisted Chemical Vapor Deposition

2021 ◽  
Vol 55 (1) ◽  
pp. 66-75
Author(s):  
A. L. Vikharev ◽  
S. A. Bogdanov ◽  
N. M. Ovechkin ◽  
O. A. Ivanov ◽  
D. B. Radishev ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Microwave Plasma ◽  
Diamond Films ◽  
Chemical Vapor ◽  
Nanocrystalline Diamond ◽  
Nanocrystalline Diamond Films
Sign in / Sign up

Export Citation Format

Share Document