Radio frequency magnetron sputtering deposition of calcium phosphate coatings: The effect of resputtering on the coating composition

B. Feddes; J. G. C. Wolke; J. A. Jansen; A. M. Vredenberg

doi:10.1063/1.1576894

Radio frequency magnetron sputtering deposition of calcium phosphate coatings: The effect of resputtering on the coating composition

Journal of Applied Physics ◽

10.1063/1.1576894 ◽

2003 ◽

Vol 93 (12) ◽

pp. 9503-9507 ◽

Cited By ~ 23

Author(s):

B. Feddes ◽

J. G. C. Wolke ◽

J. A. Jansen ◽

A. M. Vredenberg

Keyword(s):

Calcium Phosphate ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Sputtering Deposition ◽

Phosphate Coatings ◽

Coating Composition ◽

Calcium Phosphate Coatings

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Radio frequency magnetron sputtering deposition of calcium phosphate coatings: Monte Carlo simulations of the deposition process and depositions through an aperture

Journal of Applied Physics ◽

10.1063/1.1525857 ◽

2003 ◽

Vol 93 (1) ◽

pp. 662-670 ◽

Cited By ~ 17

Author(s):

B. Feddes ◽

J. G. C. Wolke ◽

J. A. Jansen ◽

A. M. Vredenberg

Keyword(s):

Monte Carlo ◽

Calcium Phosphate ◽

Magnetron Sputtering ◽

Monte Carlo Simulations ◽

Radio Frequency ◽

Deposition Process ◽

Radio Frequency Magnetron Sputtering ◽

Sputtering Deposition ◽

Phosphate Coatings ◽

Calcium Phosphate Coatings

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Deposition of calcium phosphate coatings using radio frequency magnetron sputtering of substituted β-tricalcium phosphate targets

Journal of Physics Conference Series ◽

10.1088/1742-6596/1115/3/032070 ◽

2018 ◽

Vol 1115 ◽

pp. 032070

Author(s):

A.Y. Fedotkin ◽

E.N. Bolbasov ◽

A.I. Kozelskaya ◽

A.S. Useinov ◽

S.I. Tverdokhlebov

Keyword(s):

Calcium Phosphate ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Tricalcium Phosphate ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Phosphate Coatings ◽

Calcium Phosphate Coatings

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Wafer-Scale Growth of ITO Nanorods by Radio Frequency Magnetron Sputtering Deposition

Journal of The Electrochemical Society ◽

10.1149/1.3562943 ◽

2011 ◽

Vol 158 (5) ◽

pp. K131 ◽

Cited By ~ 28

Author(s):

Jae Hyoung Park ◽

Hoo Keun Park ◽

Jinhoo Jeong ◽

Woong Kim ◽

Byoung Koun Min ◽

...

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Scale Growth ◽

Sputtering Deposition ◽

Wafer Scale

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Calcium phosphate coating deposition by radio frequency magnetron sputtering in the various inert gases: The pilot study

Materials Chemistry and Physics ◽

10.1016/j.matchemphys.2019.121735 ◽

2019 ◽

Vol 235 ◽

pp. 121735 ◽

Cited By ~ 3

Author(s):

A.Y. Fedotkin ◽

E.N. Bolbasov ◽

A.I. Kozelskaya ◽

G. Dubinenko ◽

E.V. Shesterikov ◽

...

Keyword(s):

Pilot Study ◽

Calcium Phosphate ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Inert Gases ◽

Calcium Phosphate Coating ◽

Phosphate Coating ◽

Radio Frequency Magnetron Sputtering ◽

Coating Deposition

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Extending the Photoresponse of TiO2to the Visible Light Region: Photoelectrochemical Behavior of TiO2Thin Films Prepared by the Radio Frequency Magnetron Sputtering Deposition Method

The Journal of Physical Chemistry B ◽

10.1021/jp058262g ◽

2006 ◽

Vol 110 (11) ◽

pp. 5537-5541 ◽

Cited By ~ 75

Author(s):

Hisashi Kikuchi ◽

Masaaki Kitano ◽

Masato Takeuchi ◽

Masaya Matsuoka ◽

Masakazu Anpo ◽

...

Keyword(s):

Magnetron Sputtering ◽

Visible Light ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Deposition Method ◽

Visible Light Region ◽

Radio Frequency Magnetron Sputtering ◽

Sputtering Deposition ◽

Light Region ◽

Magnetron Sputtering Deposition Method

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Biological Effect of the Surface Modification of the Fibrous Poly(L-lactic acid) Scaffolds by Radio Frequency Magnetron Sputtering of Different Calcium-Phosphate Targets

BioNanoScience ◽

10.1007/s12668-016-0383-x ◽

2017 ◽

Vol 7 (1) ◽

pp. 50-57 ◽

Cited By ~ 14

Author(s):

S. I. Goreninskii ◽

N. N. Bogomolova ◽

A. I. Malchikhina ◽

A. S. Golovkin ◽

E. N. Bolbasov ◽

...

Keyword(s):

Surface Modification ◽

Lactic Acid ◽

Calcium Phosphate ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Biological Effect ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering

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Radio frequency magnetron sputtering deposition of hetero-epitaxial strontium barium niobate thin films (SrxBa1−xNb2O6)

Journal of Applied Physics ◽

10.1063/1.1535749 ◽

2003 ◽

Vol 93 (3) ◽

pp. 1718-1724 ◽

Cited By ~ 24

Author(s):

M. Cuniot-Ponsard ◽

J. M. Desvignes ◽

B. Ea-Kim ◽

E. Leroy

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Strontium Barium Niobate ◽

Strontium Barium ◽

Sputtering Deposition

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The influence of discharge power and heat treatment on calcium phosphate coatings prepared by RF magnetron sputtering deposition

Journal of Materials Science Materials in Medicine ◽

10.1007/s10856-007-0119-0 ◽

2007 ◽

Vol 18 (6) ◽

pp. 1061-1069 ◽

Cited By ~ 15

Author(s):

Yan Yonggang ◽

J. G. C. Wolke ◽

Li Yubao ◽

J. A. Jansen

Keyword(s):

Heat Treatment ◽

Calcium Phosphate ◽

Magnetron Sputtering ◽

Rf Magnetron Sputtering ◽

Discharge Power ◽

Sputtering Deposition ◽

Phosphate Coatings ◽

Calcium Phosphate Coatings

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Radio frequency magnetron sputtering deposition of borate and phosphate glass films

10.1117/12.756819 ◽

2007 ◽

Cited By ~ 1

Author(s):

Lucica Boroica ◽

I. Boroica ◽

E. Rotiu ◽

B. Sava ◽

R. Medianu ◽

...

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Phosphate Glass ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Sputtering Deposition ◽

Glass Films

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Preparation of Nitrogen-Substituted TiO2Thin Film Photocatalysts by the Radio Frequency Magnetron Sputtering Deposition Method and Their Photocatalytic Reactivity under Visible Light Irradiation†

The Journal of Physical Chemistry B ◽

10.1021/jp064893e ◽

2006 ◽

Vol 110 (50) ◽

pp. 25266-25272 ◽

Cited By ~ 208

Author(s):

Masaaki Kitano ◽

Keisho Funatsu ◽

Masaya Matsuoka ◽

Michio Ueshima ◽

Masakazu Anpo

Keyword(s):

Magnetron Sputtering ◽

Visible Light ◽

Radio Frequency ◽

Visible Light Irradiation ◽

Radio Frequency Magnetron ◽

Light Irradiation ◽

Deposition Method ◽

Radio Frequency Magnetron Sputtering ◽

Sputtering Deposition ◽

Magnetron Sputtering Deposition Method

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