Modified gaseous electronics conference reference cell for the study of plasma-surface-gas interactions

Review of Scientific Instruments ◽

10.1063/1.1688443 ◽

2004 ◽

Vol 75 (4) ◽

pp. 884-890 ◽

Author(s):

M. J. Goeckner ◽

J. M. Marquis ◽

B. J. Markham ◽

A. K. Jindal ◽

E. A. Joseph ◽

...

Keyword(s):

Plasma Surface ◽

Reference Cell ◽

Gas Interactions ◽

Gaseous Electronics Conference

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In situ diode laser absorption measurements of plasma species in a gaseous electronics conference reference cell reactor

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.588212 ◽

1995 ◽

Vol 13 (3) ◽

pp. 954 ◽

Author(s):

Daniel B. Oh

Keyword(s):

Diode Laser ◽

Reference Cell ◽

Laser Absorption ◽

Plasma Species ◽

Cell Reactor ◽

Diode Laser Absorption ◽

Gaseous Electronics Conference ◽

Absorption Measurements

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Spatial distributions of absolute densities of argon metastable state 3p54s in a Gaseous Electronics Conference Reference Cell

Journal of Applied Physics ◽

10.1063/1.371441 ◽

1999 ◽

Vol 86 (9) ◽

pp. 4767-4771 ◽

Author(s):

Edward Augustyniak ◽

Serguei Filimonov ◽

Jacek Borysow

Keyword(s):

Metastable State ◽

Spatial Distributions ◽

Reference Cell ◽

Gaseous Electronics Conference

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Current and Voltage Measurements in the Gaseous Electronics Conference Rf Reference Cell

Journal of Research of the National Institute of Standards and Technology ◽

10.6028/jres.100.026 ◽

1995 ◽

Vol 100 (4) ◽

pp. 341 ◽

Author(s):

M.A. Sobolewski

Keyword(s):

Reference Cell ◽

Gaseous Electronics Conference

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Particle trapping, transport, and charge in capacitively and inductively coupled argon plasmas in a Gaseous Electronics Conference Reference Cell

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.580158 ◽

1996 ◽

Vol 14 (2) ◽

pp. 634-638 ◽

Author(s):

S. M. Collins ◽

D. A. Brown ◽

J. F. O’Hanlon ◽

R. N. Carlile

Keyword(s):

Particle Trapping ◽

Reference Cell ◽

Inductively Coupled ◽

Argon Plasmas ◽

Gaseous Electronics Conference

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Electron energy distribution function close to the mode transition region in an inductively coupled gaseous electronics conference reference cell

Applied Physics Letters ◽

10.1063/1.2362599 ◽

2006 ◽

Vol 89 (16) ◽

pp. 161501 ◽

Author(s):

S. V. Singh ◽

P. Kempkes ◽

H. Soltwisch

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Transition Region ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Mode Transition ◽

Reference Cell ◽

Inductively Coupled ◽

Gaseous Electronics Conference

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The Gaseous Electronics Conference Radiofrequency Reference Cell - Preface

Journal of Research of the National Institute of Standards and Technology ◽

10.6028/jres.100.001 ◽

1995 ◽

Vol 100 (4) ◽

pp. preface ◽

Author(s):

J.K. Olthoff

Keyword(s):

Reference Cell ◽

Gaseous Electronics Conference

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Optical-Emission Spectroscopy on the Gaseous Electronics Conference Rf Reference Cell

Journal of Research of the National Institute of Standards and Technology ◽

10.6028/jres.100.027 ◽

1995 ◽

Vol 100 (4) ◽

pp. 353 ◽

Author(s):

J.R. Roberts

Keyword(s):

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Reference Cell ◽

Gaseous Electronics Conference

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Dusty Plasma Studies in the Gaseous Electronics Conference Reference Cell

Journal of Research of the National Institute of Standards and Technology ◽

10.6028/jres.100.034 ◽

1995 ◽

Vol 100 (4) ◽

pp. 449 ◽

Author(s):

H.M. Anderson ◽

S.B. Radovanov

Keyword(s):

Dusty Plasma ◽

Reference Cell ◽

Gaseous Electronics Conference

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The Gaseous Electronics Conference radio‐frequency reference cell: A defined parallel‐plate radio‐frequency system for experimental and theoretical studies of plasma‐processing discharges

Review of Scientific Instruments ◽

10.1063/1.1144770 ◽

1994 ◽

Vol 65 (1) ◽

pp. 140-154 ◽

Author(s):

P. J. Hargis ◽

K. E. Greenberg ◽

P. A. Miller ◽

J. B. Gerardo ◽

J. R. Torczynski ◽

...

Keyword(s):

Radio Frequency ◽

Parallel Plate ◽

Plasma Processing ◽

Theoretical Studies ◽

Frequency Reference ◽

Reference Cell ◽

Gaseous Electronics Conference ◽

Experimental And Theoretical Studies

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Dynamic laser light scattering studies of dusty plasmas in the Gaseous Electronics Conference Reference Cell

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.580153 ◽

1996 ◽

Vol 14 (2) ◽

pp. 608-614 ◽

Author(s):

H. M. Anderson ◽

S. B. Radovanov

Keyword(s):

Light Scattering ◽

Laser Light ◽

Dusty Plasmas ◽

Laser Light Scattering ◽

Reference Cell ◽

Dynamic Laser Light Scattering ◽

Gaseous Electronics Conference

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