Anomalous behaviors of plasma parameters in unbalanced direct-current magnetron discharge

Physics of Plasmas ◽

10.1063/1.1759629 ◽

2004 ◽

Vol 11 (7) ◽

pp. 3595-3601 ◽

Author(s):

Sang-Hun Seo ◽

Hong-Young Chang

Keyword(s):

Direct Current ◽

Plasma Parameters ◽

Magnetron Discharge

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Diagnostics of a N2/Ar direct current magnetron discharge for reactive sputter deposition of fullerene-like carbon nitride thin films

Journal of Applied Physics ◽

10.1063/1.1625091 ◽

2003 ◽

Vol 94 (11) ◽

pp. 7059-7066 ◽

Author(s):

J. Neidhardt ◽

L. Hultman ◽

B. Abendroth ◽

R. Gago ◽

W. Möller

Keyword(s):

Direct Current ◽

Carbon Nitride ◽

Sputter Deposition ◽

Magnetron Discharge ◽

Reactive Sputter Deposition

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Electrical potential distribution in magnetron discharge gap of the direct current

Proceedings of the 9th International Scientific and Practical Conference of Students, Post-graduates Modern Techniques and Technologies, 2003. MTT 2003. ◽

10.1109/spcmtt.2003.1438212 ◽

2005 ◽

Author(s):

V.V. Zhukov ◽

V.V. Krivobokov ◽

V.V. Patsevich ◽

S.N. Yanin

Keyword(s):

Direct Current ◽

Potential Distribution ◽

Electrical Potential ◽

Magnetron Discharge ◽

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Numerical investigation via three-dimensional Monte Carlo modeling of sputtering and deposition processes in a direct current unbalanced magnetron discharge

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.2816940 ◽

2008 ◽

Vol 26 (1) ◽

pp. 103-113 ◽

Author(s):

R. Sobbia ◽

P. K. Browning ◽

J. W. Bradley

Keyword(s):

Monte Carlo ◽

Numerical Investigation ◽

Direct Current ◽

Three Dimensional ◽

Magnetron Discharge ◽

Monte Carlo Modeling ◽

Unbalanced Magnetron ◽

Deposition Processes

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Determination of Spatial Distributions of Plasma Parameters of a Compact Magnetron Discharge

Physics of Atomic Nuclei ◽

10.1134/s1063778819100107 ◽

2019 ◽

Vol 82 (10) ◽

pp. 1376-1381

Author(s):

V. M. Gradov ◽

A. M. Zimin ◽

S. V. Serushkin ◽

I. A. Zemtsov

Keyword(s):

Spatial Distributions ◽

Plasma Parameters ◽

Magnetron Discharge

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Evolution of the electron energy distribution and plasma parameters in a pulsed magnetron discharge

Applied Physics Letters ◽

10.1063/1.1376150 ◽

2001 ◽

Vol 78 (22) ◽

pp. 3427-3429 ◽

Author(s):

J. T. Gudmundsson ◽

J. Alami ◽

U. Helmersson

Keyword(s):

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution ◽

Plasma Parameters ◽

Magnetron Discharge ◽

Pulsed Magnetron

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Plasma Parameters in the Reactor with Simultaneous Magnetron Discharge and Inductive Radio-Frequency Discharge in the Presence of External Magnetic Field

Journal of Communications Technology and Electronics ◽

10.1134/s1064226918040010 ◽

2018 ◽

Vol 63 (4) ◽

pp. 374-380 ◽

Author(s):

A. F. Aleksandrov ◽

K. V. Vavilin ◽

E. A. Kral’kina ◽

P. A. Neklyudova ◽

A. M. Nikonov ◽

...

Keyword(s):

Magnetic Field ◽

External Magnetic Field ◽

Radio Frequency ◽

Plasma Parameters ◽

Magnetron Discharge ◽

Radio Frequency Discharge

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Simplified model for calculating the pressure dependence of a direct current planar magnetron discharge

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1572169 ◽

2003 ◽

Vol 21 (4) ◽

pp. 1218-1224 ◽

Author(s):

G. Buyle ◽

D. Depla ◽

K. Eufinger ◽

J. Haemers ◽

R. De Gryse ◽

...

Keyword(s):

Direct Current ◽

Pressure Dependence ◽

Simplified Model ◽

Magnetron Discharge ◽

Planar Magnetron

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A comparative study of plasma parameters and gas phase compositions in Cl2 and HCl direct current glow discharges

Thin Solid Films ◽

10.1016/j.tsf.2007.11.046 ◽

2008 ◽

Vol 516 (10) ◽

pp. 3020-3027 ◽

Author(s):

A.M. Efremov ◽

V.I. Svettsov ◽

D.V. Sitanov ◽

D.I. Balashov

Keyword(s):

Comparative Study ◽

Gas Phase ◽

Direct Current ◽

Plasma Parameters ◽

Glow Discharges

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Spatial and temporal behavior of the plasma parameters in a pulsed magnetron discharge

Surface and Coatings Technology ◽

10.1016/s0257-8972(02)00518-2 ◽

2002 ◽

Vol 161 (2-3) ◽

pp. 249-256 ◽

Author(s):

J.T. Gudmundsson ◽

J. Alami ◽

U. Helmersson

Keyword(s):

Temporal Behavior ◽

Plasma Parameters ◽

Magnetron Discharge ◽

Pulsed Magnetron

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Structure of the direct-current magnetron discharge in neon at different polarities of the electrode system

Technical Physics ◽

10.1134/s1063784210090082 ◽

2010 ◽

Vol 55 (9) ◽

pp. 1283-1287

Author(s):

A. V. Sasin ◽

S. D. Wagner ◽

A. A. Platonov

Keyword(s):

Direct Current ◽

Electrode System ◽

Magnetron Discharge

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