The TiO2 thin film was grown on a [Formula: see text] Y-axis cut, X-axis propagation lithium niobate substrate by radio frequency magnetron sputtering to fabricate a surface acoustic wave device. The sputtering ratios of argon to oxygen at 20% and post-annealing temperature at [Formula: see text]C for 3 h were controlled to improve the photocatalytic activity of TiO2 thin film. The effects of work frequency and input voltage of the surface acoustic wave device on the methylene blue photocatalytic degradation efficiency of the TiO2 thin film were investigated. The TiO2 thin film was vibrated at radio frequency by surface acoustic wave device to increase the scattering and reactive frequency for methylene blue in liquid. The surface acoustic wave device operated at 28.65 MHz work frequency and 0.95 V input voltage revealed the highest photocatalytic degradation efficiency of methylene blue. Compared to the TiO2 thin film combined with and without surface acoustic wave device, the surface acoustic wave device enhanced the TiO2 thin film photocatalytic degradation efficiency to 46%.
High-frequency surface acoustic wave device based on thin-film piezoelectric interdigital transducers
