Imaging and analysis of subsurface Cu interconnects by detecting backscattered electrons in the scanning electron microscope

2005 ◽  
Vol 97 (11) ◽  
pp. 114506 ◽  
Author(s):  
L. M. Gignac ◽  
M. Kawasaki ◽  
S. H. Boettcher ◽  
O. C. Wells
2008 ◽  
Vol 16 (4) ◽  
pp. 62-63
Author(s):  
V.M. Dusevich ◽  
J.H. Purk ◽  
J.D. Eick

Coloring pictures is an educational exercise, which is fun, and helps develop important skills. Coloring SEM micrographs is especially suitable for electron microscopists. Color micrographs are not just great looking on a lab wall; they inspire both microscopists and students to exercise digital picture manipulation. Many microscopists enjoyed looking at the beautiful color micrographs by D. Scharf, but were frustrated to learn they needed a very particular scanning electron microscope equipped with multiple secondary electron detectors in order to color their own pictures. Fortunately, there are other ways to color SEM micrographs. Most SEMs are equipped with at least two detectors, for secondary and backscattered electrons.


1994 ◽  
Vol 354 ◽  
Author(s):  
A. Bosacchi ◽  
S. Franchi ◽  
D. Govoni ◽  
G. Mattei ◽  
P.G. Merli ◽  
...  

AbstractObservations of semiconductor superstructures with backscattered electrons in a scanning electron microscope have been used to revisit the concept of resolution of the backscattering imaging mode. It will be shown that the generation volume doesn't represent in itself a limit to the resolution, which depends only on the beam size and the signal to noise ratio.


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