Copper nitride thin film prepared by reactive radio-frequency magnetron sputtering

2005 ◽  
Vol 98 (10) ◽  
pp. 103506 ◽  
Author(s):  
G. H. Yue ◽  
P. X. Yan ◽  
J. Z. Liu ◽  
M. X. Wang ◽  
M. Li ◽  
...  
Keyword(s):  
Thin Film ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Copper Nitride

Fabrication and characterizations of ZnO thin film transistors prepared by using radio frequency magnetron sputtering

2008 ◽  
Vol 52 (5) ◽  
pp. 813-816 ◽  
Author(s):  
R. Navamathavan ◽  
Chi Kyu Choi ◽  
Eun-Jeong Yang ◽  
Jae-Hong Lim ◽  
Dae-Kue Hwang ◽  
...  
Keyword(s):  
Thin Film ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Thin Film Transistors ◽  
Radio Frequency Magnetron ◽  
Zno Thin Film ◽  
Radio Frequency Magnetron Sputtering

Influences of nitrogen partial pressure on the optical properties of copper nitride films

RSC Advances ◽  
2016 ◽  
Vol 6 (47) ◽  
pp. 40895-40899 ◽  
Author(s):  
Jianrong Xiao ◽  
Meng Qi ◽  
Yong Cheng ◽  
Aihua Jiang ◽  
Yaping Zeng ◽  
...  
Keyword(s):  
Optical Properties ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Partial Pressure ◽  
Radio Frequency Magnetron ◽  
Nitrogen Partial Pressure ◽  
Radio Frequency Magnetron Sputtering ◽  
Copper Nitride

Cu3N films were prepared by radio frequency magnetron sputtering techniques and the optical properties of the films were investigated.

ZnO thin film synthesis by reactive radio frequency magnetron sputtering

2014 ◽  
Vol 318 ◽  
pp. 2-5 ◽  
Author(s):  
Volkan Şenay ◽  
Suat Pat ◽  
Şadan Korkmaz ◽  
Tuna Aydoğmuş ◽  
Saliha Elmas ◽  
...  
Keyword(s):  
Thin Film ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Zno Thin Film ◽  
Radio Frequency Magnetron Sputtering ◽  
Film Synthesis
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