Ray-Tracing Analysis of Fresnel-Zone-Plate Optical System as an Electron Beam Profile Monitor

2007 ◽  
Author(s):  
Masami Fujisawa ◽  
Hiroshi Sakai ◽  
Norio Nakamura ◽  
Hitoshi Hayano ◽  
Toshiya Muto
Keyword(s):  
Electron Beam ◽  
Ray Tracing ◽  
Optical System ◽  
Fresnel Zone ◽  
Beam Profile ◽  
Zone Plate ◽  
Fresnel Zone Plate ◽  
Beam Profile Monitor

scholarly journals Fabrication and Performance Test of Fresnel Zone Plate with 35 nm Outermost Zone Width in Hard X-Ray Region

2010 ◽  
Vol 2010 ◽  
pp. 1-6 ◽  
Author(s):  
Yoshio Suzuki ◽  
Akihisa Takeuchi ◽  
Hisataka Takenaka ◽  
Ikuo Okada
Keyword(s):  
Performance Test ◽  
Fresnel Zone ◽  
Beam Profile ◽  
Zone Plate ◽  
Fresnel Zone Plate ◽  
Etching Technique ◽  
X Ray ◽  
Zone Width ◽  
Focused Beam ◽  
Outermost Zone

A Fresnel zone plate (FZP) with 35 nm outermost zone width has been fabricated and tested in the hard X-ray region. The FZP was made by electron beam lithography and reactive ion etching technique. The performance test of the FZP was carried out by measuring the focused beam profile for coherent hard X-ray beam at the beamline 20XU of SPring-8. The full width at half maximum of the focused beam profile measured by knife-edge scan method is 34.9±2.7 nm, that agrees well with the theoretical value of diffraction-limited resolution. Applications to scanning microscopy were also carried out.

scholarly journals Ray tracing through Fresnel zone plate.

1987 ◽  
Vol 36 (6) ◽  
pp. 395-399
Author(s):  
Kohgo KAMIYA ◽  
Minoru YOSHIDA
Keyword(s):  
Ray Tracing ◽  
Fresnel Zone ◽  
Zone Plate ◽  
Fresnel Zone Plate
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