Characterization of local electrical properties of polycrystalline silicon thin films and hydrogen termination effect by conductive atomic force microscopy
2003 ◽
Vol 93
◽
pp. 339-344
◽
2003 ◽
Vol 42
(Part 2, No. 11A)
◽
pp. L1302-L1304
2006 ◽
Vol 243
(1)
◽
pp. 16-19
◽
2012 ◽
Vol 358
(17)
◽
pp. 2082-2085
◽
2015 ◽
Vol 70
◽
pp. 373-378
◽
2011 ◽
Vol 5
(10-11)
◽
pp. 373-375
◽