Correlation of the anisotropic etching of single−crystal silicon spheres and wafers

Journal of Applied Physics ◽

10.1063/1.321787 ◽

1975 ◽

Vol 46 (4) ◽

pp. 1478-1483 ◽

Author(s):

Donald F. Weirauch

Keyword(s):

Single Crystal ◽

Single Crystal Silicon ◽

Anisotropic Etching ◽

Crystal Silicon ◽

Silicon Spheres

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Computer Simulation of Anisotropic Etching Process of Single Crystal Silicon

CIRP Annals ◽

10.1016/s0007-8506(07)62687-0 ◽

1989 ◽

Vol 38 (1) ◽

pp. 211-214 ◽

Author(s):

Y. Furukawa

Keyword(s):

Computer Simulation ◽

Single Crystal ◽

Single Crystal Silicon ◽

Anisotropic Etching ◽

Etching Process ◽

Crystal Silicon

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Anisotropic-etching process simulation system MICROCAD analyzing complete 3D etching profiles of single crystal silicon

Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems An Investigation of Micro Structures Sensors Actuators Machines and Robots MEMSYS-97 ◽

10.1109/memsys.1997.581877 ◽

2002 ◽

Author(s):

K. Asaumi ◽

Y. Iriye ◽

K. Sato

Keyword(s):

Single Crystal ◽

Process Simulation ◽

Single Crystal Silicon ◽

Anisotropic Etching ◽

Simulation System ◽

Etching Process ◽

Crystal Silicon

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Ellipsometric measurements on single-crystal silicon spheres [for Avogadro's constant determination]

1998 Conference on Precision Electromagnetic Measurements Digest (Cat. No.98CH36254) ◽

10.1109/cpem.1998.699965 ◽

2002 ◽

Author(s):

H.U. Danzebrink ◽

H. Wolff ◽

P. Becker ◽

L. Koenders

Keyword(s):

Single Crystal ◽

Single Crystal Silicon ◽

Crystal Silicon ◽

Constant Determination ◽

Silicon Spheres

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Fabrication and Sphericity Measurements of Single-crystal Silicon Spheres

10.1088/0026-1394/31/3/009 ◽

1994 ◽

Vol 31 (3) ◽

pp. 231-243 ◽

Author(s):

A J Leistner ◽

W J Giardini

Keyword(s):

Single Crystal ◽

Single Crystal Silicon ◽

Crystal Silicon ◽

Silicon Spheres

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Anisotropic etching rates of single-crystal silicon for TMAH water solution as a function of crystallographic orientation

Sensors and Actuators A Physical ◽

10.1016/s0924-4247(98)00271-4 ◽

1999 ◽

Vol 73 (1-2) ◽

pp. 131-137 ◽

Author(s):

Kazuo Sato ◽

Mitsuhiro Shikida ◽

Takashi Yamashiro ◽

Kazuo Asaumi ◽

Yasuroh Iriye ◽

...

Keyword(s):

Single Crystal ◽

Crystallographic Orientation ◽

Water Solution ◽

Single Crystal Silicon ◽

Anisotropic Etching ◽

Crystal Silicon

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Influence of anisotropic etching on the mechanical strength of single-crystal silicon wafers

phys stat sol (a) ◽

10.1002/pssa.2211270113 ◽

1991 ◽

Vol 127 (1) ◽

pp. 127-131

Author(s):

Sh. M. Gasanli ◽

N. M. Gasanly ◽

A. K. Streltsov

Keyword(s):

Mechanical Strength ◽

Single Crystal ◽

Single Crystal Silicon ◽

Anisotropic Etching ◽

Silicon Wafers ◽

Crystal Silicon

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Improvement of sawtooth shape generated by anisotropic etching process of single-crystal silicon for microparts feeding using horizontal and symmetric vibrations

2013 IEEE/ASME International Conference on Advanced Intelligent Mechatronics ◽

10.1109/aim.2013.6584219 ◽

2013 ◽

Author(s):

Atsushi Mitani ◽

Hoai Phuong Le ◽

Yasutaka Matsuo ◽

Shinichi Hirai

Keyword(s):

Single Crystal ◽

Single Crystal Silicon ◽

Anisotropic Etching ◽

Etching Process ◽

Crystal Silicon

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Anisotropic etching rates of single-crystal silicon for TMAH water solution as a function of crystallographic orientation

Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176) ◽

10.1109/memsys.1998.659818 ◽

2002 ◽

Author(s):

K. Sato ◽

M. Shikida ◽

T. Yamashiro ◽

K. Asaumi ◽

Y. Iriye ◽

...

Keyword(s):

Single Crystal ◽

Crystallographic Orientation ◽

Water Solution ◽

Single Crystal Silicon ◽

Anisotropic Etching ◽

Crystal Silicon

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High-precision large-diameter single-crystal silicon spheres: their fabrication and measurements of sphericity

10.1117/12.218436 ◽

1995 ◽

Author(s):

Achim J. Leistner ◽

Walter J. Giardini

Keyword(s):

Single Crystal ◽

High Precision ◽

Large Diameter ◽

Single Crystal Silicon ◽

Crystal Silicon ◽

Silicon Spheres

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Feeding of microparts along an asymmetric surface using horizontal and symmetric vibrations — Development of asymmetric surfaces using anisotropic etching process of single-crystal silicon

2011 IEEE International Conference on Robotics and Biomimetics ◽

10.1109/robio.2011.6181384 ◽

2011 ◽

Author(s):

Atsushi Mitani ◽

Yasutaka Matsuo

Keyword(s):

Single Crystal ◽

Single Crystal Silicon ◽

Anisotropic Etching ◽

Etching Process ◽

Crystal Silicon

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