Anisotropic etching rates of single-crystal silicon for TMAH water solution as a function of crystallographic orientation

2002 ◽  
Author(s):  
K. Sato ◽  
M. Shikida ◽  
T. Yamashiro ◽  
K. Asaumi ◽  
Y. Iriye ◽  
...  
Keyword(s):  
Single Crystal ◽  
Crystallographic Orientation ◽  
Water Solution ◽  
Single Crystal Silicon ◽  
Anisotropic Etching ◽  
Crystal Silicon

Anisotropic etching rates of single-crystal silicon for TMAH water solution as a function of crystallographic orientation

1999 ◽  
Vol 73 (1-2) ◽  
pp. 131-137 ◽  
Author(s):  
Kazuo Sato ◽  
Mitsuhiro Shikida ◽  
Takashi Yamashiro ◽  
Kazuo Asaumi ◽  
Yasuroh Iriye ◽  
...  
Keyword(s):  
Single Crystal ◽  
Crystallographic Orientation ◽  
Water Solution ◽  
Single Crystal Silicon ◽  
Anisotropic Etching ◽  
Crystal Silicon
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