Determination of the electron temperature by optical emission spectroscopy in a 13.56 MHz dusty methane plasma: Influence of the power
2009 ◽
Vol 43
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pp. 015202
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2002 ◽
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pp. 555-563
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2010 ◽
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pp. 403001
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2003 ◽
Vol 434
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pp. 157-161
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2001 ◽
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2016 ◽
2011 ◽
Vol 44
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pp. 285203
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